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公开(公告)号：US12131922B1
公开(公告)日：2024-10-29
申请号：US17089585
申请日：2020-11-04
申请人： Apple Inc.
CPC分类号： H01L21/67144 , B65G47/90 , H01L21/68 , H01L21/681 , H01L21/6831 , B25J7/00 , B25J9/0015 , B25J15/0085
摘要： A micro device transfer tool and methods of operation in which the micro device transfer tool includes an articulating transfer head assembly capable of six degrees of motion. A miniatured camera assembly may be secured near the point of contact for the articulating transfer head assembly to aid in system alignment. In an embodiment, an encoder system is included for alignment of a micro pick up array and target substrate using complementary concentric grating patterns. In an embodiment a miniaturized position sensor design is included for sensing position of various system components during alignment or pick and place processes.
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公开(公告)号：US12129122B2
公开(公告)日：2024-10-29
申请号：US17319747
申请日：2021-05-13
申请人： HDS Mercury, Inc.
发明人： Aravind Durai , Thomas Vrenios
CPC分类号： B65G1/1378 , B65G1/0485 , B65G47/90 , B65G60/00 , B25J5/02 , B65G2203/0208 , B65G2203/042
摘要： A system of inventory management is described. It includes at least one container adapted to hold inventory items. A conveyor system is adapted to move the containers to and from pick cells. Each pick cell contains an array of processing locations designed to receive containers and an inventory movement tool such as a robotic arm designed to interact with containers received by the pick cell. The pick cells include at least one buffer shelf for processing items.
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公开(公告)号：US12128557B2
公开(公告)日：2024-10-29
申请号：US17874337
申请日：2022-07-27
发明人： Thomas Wagner , Kevin Ahearn , John Richard Amend, Jr. , Benjamin Cohen , Michael Dawson-Haggerty , William Hartman Fort , Christopher Geyer , Victoria Hinchey , Jennifer Eileen King , Thomas Koletschka , Michael Cap Koval , Kyle Maroney , Matthew T. Mason , William Chu-Hyon McMahan , Gene Temple Price , Joseph Romano , Daniel Smith , Siddhartha Srinivasa , Prasanna Velagapudi , Thomas Allen
CPC分类号： B25J9/0093 , B25J9/1615 , B65G1/0464 , B65G1/1371 , B65G1/1376 , B65G1/1378 , B65G47/82 , B65G47/905 , G06Q10/087 , B65G2201/0258 , G06Q10/08
摘要： A processing system for processing objects using a programmable motion device is disclosed. The processing system includes a plurality of supply bins providing supply of a plurality of objects, with the plurality of supply bins being provided with a bin conveyance system, a programmable motion device in communication with the bin conveyance system, where the programmable motion device includes an end effector for grasping and moving a selected object out of a selected supply bin, and a movable carriage for receiving the selected object from the end effector of the programmable motion device, and for carrying the selected object to one of a plurality of destination containers.
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公开(公告)号：US20240355660A1
公开(公告)日：2024-10-24
申请号：US18761592
申请日：2024-07-02
发明人： Wei-Chih LIAO , Shih-Yu TSENG
IPC分类号： H01L21/677 , B65G47/90 , H01L21/687
CPC分类号： H01L21/67742 , B65G47/90 , H01L21/67706 , H01L21/67745 , H01L21/67778 , H01L21/68707
摘要： Air curtain devices can reduce defects on semiconductor wafers when implemented on a track equipped with robotic wafer transport. The air curtain devices can be added to one or more processing devices arranged along the track to prevent defects from landing on wafer surfaces. For example, the air curtain devices can prevent volatile organic solvent mist from drifting towards processing devices on the track and preventing contamination via a wafer transport system.
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公开(公告)号：US20240343503A1
公开(公告)日：2024-10-17
申请号：US18643833
申请日：2024-04-23
发明人： Thomas Wagner , Kevin Ahearn , John Richard Amend, JR. , Benjamin Cohen , Michael Dawson-Haggerty , William Hartman Fort , Christopher Geyer , Victoria Hinchey , Jennifer Eileen King , Thomas Koletschka , Michael Cap Koval , Kyle Maroney , Matthew T. Mason , William Chu-Hyon McMahan , Gene Temple Price , Joseph Romano , Daniel Smith , Siddhartha Srinivasa , Prasanna Velagapudi , Thomas Allen
CPC分类号： B65G47/90 , B65G1/0485 , B65G1/1378 , B65G47/52 , B65G67/02
摘要： A storage, retrieval and processing system for processing objects is disclosed. The storage, retrieval and processing system includes a storage bin system for receiving at a first end thereof, a plurality of storage bins providing storage of a plurality of objects, a retrieval conveyance system at a second end of the storage bin system that is generally opposite the first end of the storage bin system, where the retrieval conveyance system is in communication with the plurality of storage bins, a programmable motion device in communication with the retrieval conveyance system for receiving the storage bins from the plurality of storage bins, where the programmable motion device includes an end effector for grasping and moving a selected object out of a selected storage bin, and a destination bin system for receiving the selected object from the end effector of the programmable motion device at first end of the destination bin system, and the destination bin system provides access to the plurality of destination bins at a second end thereof that is generally opposite the first end of the destination bin system.
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公开(公告)号：US12115683B2
公开(公告)日：2024-10-15
申请号：US18355355
申请日：2023-07-19
IPC分类号： B25J9/16 , B65G47/90 , H01L21/67 , H01L21/677 , H01L21/68 , H01L21/687 , B25J11/00 , B25J13/08
CPC分类号： B25J9/1692 , B65G47/905 , H01L21/67167 , H01L21/67196 , H01L21/67259 , H01L21/67706 , H01L21/67742 , H01L21/67745 , H01L21/68 , H01L21/68707 , B25J9/1697 , B25J11/0095 , B25J13/08
摘要： A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.
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公开(公告)号：US12110194B2
公开(公告)日：2024-10-08
申请号：US17632506
申请日：2020-07-09
CPC分类号： B65G47/905 , B25J9/1664
摘要： A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.
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公开(公告)号：US20240312821A1
公开(公告)日：2024-09-19
申请号：US18670921
申请日：2024-05-22
发明人： Jung-ho YUN , Yonggu KANG , Mid Uem RYU , Hiroki SANEMASA , Takashi MINAMI , Daisuke HIGASHITARUMIZU
IPC分类号： H01L21/68 , B25J9/16 , B65G47/90 , H01L21/687
CPC分类号： H01L21/681 , B25J9/163 , B65G47/905 , H01L21/68707
摘要： An automatic teaching apparatus for semiconductor manufacturing equipment includes: an equipment front end module (EFEM); one or more load ports provided along an edge of one side of the EFEM to be connected to an inside of the EFEM; a transfer robot disposed in the inside of the EFEM and configured to transfer a wafer to the one or more load ports by an end effector to process the wafer, and a load port teaching unit configured to detect a fixed position of the end effector in a state of unloading the wafer such that the wafer is placed in the fixed position within the load port.
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公开(公告)号：US12084281B2
公开(公告)日：2024-09-10
申请号：US18132080
申请日：2023-04-07
申请人： WALMART APOLLO, LLC
CPC分类号： B65G1/1378 , B65G1/0492 , B65G1/065 , B65G47/681 , B65G47/905
摘要： An apparatus is disclosed including a robotic system having a robotic picking workstation, tote storage and retrieval and transit decks. The system has bots that autonomously transport totes from the storage and retrieval system to the robotic picking workstation via the transit decks. The robotic picking workstation may have a picking lane where a robotic handler transports eaches from totes on the bots to order totes in the workstation. The robotic picking workstation further has a queuing buffer where bots are cued for the picking lane.
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公开(公告)号：US12077392B2
公开(公告)日：2024-09-03
申请号：US17315423
申请日：2021-05-10
IPC分类号： B65G47/90 , G03F7/16 , H01L21/677 , H01L21/683 , H01L21/687 , H05K9/00
CPC分类号： B65G47/90 , G03F7/162 , H01L21/67766 , H01L21/6838 , H01L21/68707 , H01L21/6875 , H05K9/0067
摘要： A substrate transfer apparatus includes: a non-conductive support with an upper surface that faces a substrate and supports the substrate; a mover that moves the support to transfer the substrate; a connector that connects the support and the mover while being grounded; a conductive contact that is provided on the upper surface of the support, and supports the substrate in contact with a lower surface of the substrate such that the substrate is not brought into contact with the support; a strip-shaped conductive path that is provided to connect the contact and the connector. The strip-shaped conductive path is provided with a bent portion such that an interval of the strip-shaped conductive path formed by the bent portion is at least twice a width of the strip-shaped conductive path.
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