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公开(公告)号：US20240365670A1
公开(公告)日：2024-10-31
申请号：US18641417
申请日：2024-04-21
发明人： Hao-Chien Cheng , Kai-Chih Liang , Ming-Ching Wu
CPC分类号： H10N30/206 , B81B3/0021 , H10N30/802 , B81B2203/0163 , B81B2203/0346 , B81B2203/04 , B81B2203/058 , G02B26/0858
摘要： A piezoelectric actuating apparatus includes a frame having an opening, a rotatable element, first and second actuating elements, a sensing element, transmission elements, a sensing electrode, and a driving electrode. The rotatable element is in the opening, connected to the frame via a rotating shaft structure, and reciprocatingly swings relative to the frame around an axis of the rotating shaft structure as a center. The first actuating element is connected to the rotatable element. The transmission elements are between the first and second actuating elements, and between the first actuating element and the sensing element. The second actuating element and the sensing element are coupled to the rotatable element via the transmission elements. The sensing electrode is on a part of the transmission elements and the sensing element. The driving electrode is on another part of the transmission elements and the first and second actuating elements.
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公开(公告)号：US12133060B2
公开(公告)日：2024-10-29
申请号：US18532607
申请日：2023-12-07
CPC分类号： H04R7/08 , B81B3/0021 , H04R7/16 , H04R19/04 , B81B2201/0257 , B81B2203/0127 , B81B2203/0353 , B81B2203/04 , H04R2201/003
摘要： A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber.
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公开(公告)号：US12133050B2
公开(公告)日：2024-10-29
申请号：US15931965
申请日：2020-05-14
IPC分类号： H04R23/00 , B81B3/00 , B81C1/00 , G01H9/00 , G01S3/80 , G02B5/18 , G02B27/42 , G06F3/042 , G10L15/22 , G10L25/78 , H01H1/00
CPC分类号： H04R23/008 , G01H9/008 , B81B3/0083 , B81B2201/0264 , B81B2201/047 , B81C1/00158 , G01H9/004 , G01S3/80 , G02B5/1814 , G02B27/42 , G02B27/4233 , G06F3/042 , G10L15/22 , G10L25/78 , H01H1/0036 , H04R2410/00
摘要： A device for sensing a motion of a deflectable surface includes a deflectable element having a first side beam deflectable and includes a reflective surface at a second side of the deflectable element, proposing the first side. The device includes an optical emitter for emitting an optical signal towards the reflective surface and an optical receiver for receiving a reflected optical signal from the reflective surface and for providing a reception signal based on a reflective optical signal. The device includes a control unit in communication with the optical receiver for determining information related to the motion of the deflectable element based on the reception signal.
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公开(公告)号：US20240351864A1
公开(公告)日：2024-10-24
申请号：US18136556
申请日：2023-04-19
申请人： InvenSense, Inc.
发明人： Roberto Martini , Matthew Julian Thompson , Giacomo Gafforelli , Luca Coronato , Luigi Esposito
CPC分类号： B81C1/00349 , B81B3/0018 , B81B2201/0235 , B81B2203/0109 , B81B2203/03 , B81B2203/04 , B81C2201/0109 , B81C2201/0132 , B81C2201/0147
摘要： An actuator layer of a MEMS sensor is be fabricated to include multi-level features, such as additional sense electrodes, vertical bump stops, or weighted proof masses. A sacrificial layer is deposited on the actuator layer such that locations are provided for the multi-level features to extend vertically from the actuator layer. After the multi-layer features are fabricated on the actuator layer the sacrificial layer is removed. Additional processing such as patterning of the actuator layer may be performed to provide desired functionality and electrical signals to portions of the actuator layer, including to the multi-level features.
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公开(公告)号：US20240343552A1
公开(公告)日：2024-10-17
申请号：US18615358
申请日：2024-03-25
申请人： Robert Bosch GmbH
发明人： Christoph Schelling
CPC分类号： B81B3/0021 , H04R7/06 , H04R19/04 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/04 , H04R2201/003
摘要： A microelectromechanical component for interacting with a pressure gradient of a fluid. The component has a substrate with a through-cavity, a microelectromechanical transducer including a middle support layer and two diaphragm elements spaced apart from the middle support layer. The middle support layer has at least one center electrode. The diaphragm elements each have a separately contactable outer electrode. The diaphragm elements together with the middle support layer form one or more cavities on both sides of the middle support layer. The microelectromechanical transducer spans the through-cavity at least partially and is deformable along a vertical movement direction. The microelectromechanical transducer has a bending region. A deformation of the microelectromechanical transducer in the vertical movement direction results in a bending of the bending region. Spacers are arranged between the middle support layer and the diaphragm elements. At least one of the spacers is arranged in the bending region.
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公开(公告)号：US20240343551A1
公开(公告)日：2024-10-17
申请号：US18751695
申请日：2024-06-24
发明人： Yi-Chuan TENG , Chun-Yin TSAI , Chia-Hua CHU , Chun-Wen CHENG
CPC分类号： B81B3/001 , B81B3/007 , B81C1/00158 , H04R19/005 , H10N30/308 , B81B2201/0257 , B81B2203/0127 , B81B2203/0315 , B81B2207/07
摘要： Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a dielectric layer formed over the substrate. The semiconductor device structure further includes a movable membrane formed over the dielectric layer. In addition, the movable membrane includes first recessed portions arranged in a ring shape in a top view and second recessed portions surrounded by the first recessed portions.
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公开(公告)号：US12116268B2
公开(公告)日：2024-10-15
申请号：US18238021
申请日：2023-08-25
发明人： Stefan Richter , Johannes Kindt , Veljko Milanovic
CPC分类号： B81B3/0078 , H02N1/008 , B81B2201/04 , B81B2203/0154 , B81B2203/058
摘要： MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. A sensor coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.
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8.发明授权公开(公告)号：US12116267B2
公开(公告)日：2024-10-15
申请号：US17538784
申请日：2021-11-30
发明人： Wenlin Jin , Edward Wang
CPC分类号： B81B3/0059 , G02B26/0841 , B81B2203/0136
摘要： A micro-electro-mechanical system (MEMS) device includes a mirror; at least one hinge; an electrostatic comb structure; and a control device. The control device causes, for a period of time, a voltage to be supplied to the electrostatic comb structure to cause the electrostatic comb structure to tilt the mirror about the at least one hinge in a particular direction. The control device causes, after the period of time and at an instant of time, the voltage to cease being supplied to the electrostatic comb structure. A tilt angle of the mirror, at the first instant of time, is less than a maximum tilt angle of the mirror in the particular direction. An angular momentum of the mirror, at the instant of time, is greater than zero kilogram meters squared per second in the particular direction.
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9.发明公开公开(公告)号：US20240327203A1
公开(公告)日：2024-10-03
申请号：US18613746
申请日：2024-03-22
CPC分类号： B81B7/007 , B81B3/007 , B81C1/00301 , B81C1/00658 , H01L25/18 , H10N39/00 , B81B2201/0271 , B81B2203/0127 , B81B2207/012 , B81B2207/096 , B81C2203/0792
摘要： A method for manufacturing a MEMS device includes forming a first solid body by forming, on a substrate, a layered structure having a thickness of a value comprised between 4 and 10 μm, with the layered structure having a first surface that is uniformly flat or planar throughout the extension thereof that faces the substrate. The method further includes forming, on a second surface of the layered structure opposite to the first surface in a direction, multiple transducer devices. The method then proceeds with coupling the first solid body to a supporting structure, and completely removing the substrate to expose said uniformly flat or planar surface.
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公开(公告)号：US20240327200A1
公开(公告)日：2024-10-03
申请号：US18328624
申请日：2023-06-02
申请人： Omnitron Sensors
发明人： Trent Huang
CPC分类号： B81B3/0054 , G02B26/0833 , B81B2201/042
摘要： A system and method for precisely positioning a moveable structure in a micro-electromechanical system (MEMS). The system includes a substrate and a moveable device structure supported on the substrate. The device structure is moveable from an initial position to a deployment position at a predetermined offset angle to the substrate. A moveable anchor structure is supported on the substrate in proximity to the device structure. The anchor structure is locked to the device structure when the device structure is moved to the deployment position.
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