Hydrophilization treatment liquid for semiconductor wafer surface

    公开(公告)号:US12060498B2

    公开(公告)日:2024-08-13

    申请号:US17261931

    申请日:2020-03-18

    发明人: Yuichi Sakanishi

    摘要: Provided is a hydrophilization treatment liquid for a semiconductor wafer surface, the hydrophilization treatment liquid being capable of imparting hydrophilicity to the semiconductor wafer surface.
    A hydrophilization treatment liquid for a semiconductor wafer surface, the hydrophilization treatment liquid comprising water and a compound represented by Formula (1) below, and a total content of the water and the compound represented by Formula (1) below being 95 wt. % or greater.

    R1O—(C3H6O2)n—H  (1)



    where R1 denotes a hydrogen atom, a hydrocarbon group having from 1 to 24 carbon atoms and optionally having a hydroxyl group, or a group represented by R2CO, the R2 denoting a hydrocarbon group having from 1 to 24 carbon atoms; and n indicates an average degree of polymerization of a glycerin unit in the parentheses, and is from 2 to 60.

    Perfluoro surfactant and preparation method therefor

    公开(公告)号:US12018200B2

    公开(公告)日:2024-06-25

    申请号:US17293699

    申请日:2019-10-30

    发明人: Ai Chen

    IPC分类号: C09K23/00 C08G65/00

    CPC分类号: C09K23/007 C08G65/007

    摘要: A perfluoro surfactant and a preparation method therefor. A carbon fluorine bond is not prone to break when the perfluoro surfactant is used as an emulsifier in a fluorine polymer reaction, such that the average molecular weight of a fluorine polymer generated in the fluorine polymer reaction is significantly increased. The preparation method is implemented in a continuous micro-channel reaction system, where the retention time of a reactant in the reaction system can be greatly shortened to few minutes or even seconds, a back-mixing phenomenon in the reaction system can be basically eliminated, and thus the occurrence of a side reaction, an optical coupling reaction, can be greatly reduced. There are reaction stages comprising an ozonization reaction and a photo-oxidation reaction.