摘要:
Disclosed are a processing method for fluorination of a fluorination-target component for semiconductor fabrication equipment, which may realize high density and high strength by fluorinating the fluorination-target component using a fluorinating gas excited into plasma, and at the same time, may significantly reduce plasma contaminant particles which are generated during formation of a fluoride coating, and a fluorinated component obtained by the method.
摘要:
The invention relates to a method and device for thermally treating workpieces, the device including a cooling chamber and two or more carburizing chambers in which the work pieces are heated to a temperature of 950 to 1200° C. by means of direct heat radiation from a heating device.
摘要:
Apparatus and systems may operate to provide a first reactant as a gas that flows under reduced atmospheric pressure to interact with a surface, such as a tool body surface, the interaction confined to a passage within the tool body, wherein the passage includes the surface and extends without interruption from an entrance end of the passage to an exit end of the passage. Additional activity may include providing a second reactant as a gas under the reduced atmospheric pressure, subsequent to the first reactant, to interact with the surface of the tool body; and repeated provision of the first and second reactants until a selected coating thickness on the surface is formed. Additional apparatus, systems, and methods are disclosed.
摘要:
A process for preparing mist, which includes micro/nano solids or liquids, and a process for forming new materials by mist gas discharge, and also an apparatus for forming new materials. The advantages are: as compared to common gases, mists exhibit broader selection range of elements and compounds and broader range of suitable temperature and pressure. Due to the presence of mist AI(m), in a sealed container, the concentration of A in unit volume of mist is far higher than the concentration of A in unit volume of gas. Under specific conditions, the physical/chemical reactions can be carried out more easily, and new materials can be formed with higher efficiency.
摘要:
A method for manufacturing an electric contact material in which a surface layer portion of an alloy containing 1 to 15 mass % of Cu, 0.01 to 0.7 mass % of Ni, and the remainder of Ag and unavoidable impurities is supplied with an amount of oxygen exceeding the amount of oxygen required for internal oxidation of Cu to form an oxygen concentrated layer.
摘要:
The disclosure provides a device and method used to produce a tubular structure made of a refractory metal compound. In particular, the disclosure provides a device and method used to produce a tubular structure made of a refractory metal compound by reacting a green tubular structure made of a refractory metal with at least one reactive gas.
摘要:
An article of manufacture and a method for providing an Fe—Cr ferritic steel article of manufacture having a surface layer modification for corrosion resistance. Fe—Cr ferritic steels can be modified to enhance their corrosion resistance to liquid coal ash and other chemical environments, which have chlorides or sulfates containing active species. The steel is modified to form an aluminide/silicide passivating layer to reduce such corrosion.
摘要:
The present invention relates to a component (1) comprising an element (2), which contains zirconium or a zirconium alloy and which has a surface (3) on which a corrosion protective layer (4) is formed, the oxide layer (4) comprising zirconium oxide. The component (1) is intended to be in an oxidising environment (6) and said oxide layer (4) has an outer surface (5) towards said oxidising environment (6). The element (2) comprises a layer (10), that borders said surface (3) and comprises hydrogen and at least one metal from the group of lanthanum elements and/or from the group platinum metals and/or yttrium which in its elemental form or as an oxide have the ability to effectively dissociate oxygen and H2O. The invention also relates to a method for manufacturing the component (1) and a nuclear facility comprising the component (1).
摘要翻译:本发明涉及一种包含元素(2)的组分(1),其含有锆或锆合金,并且具有形成有腐蚀保护层(4)的表面(3),氧化物层(4) 包括氧化锆。 组分(1)旨在处于氧化环境(6)中,并且所述氧化物层(4)具有朝向所述氧化环境(6)的外表面(5)。 元件(2)包括与所述表面(3)相接合的层(10),并且包含氢和至少一种来自镧元素的金属和/或其元素形式的铂金属和/或钇 或作为氧化物具有有效地解离氧和H 2 O 2的能力。 本发明还涉及用于制造组分(1)的方法和包含组分(1)的核设施。
摘要:
In a process of fabricating a stent composed primarily of niobium alloyed with a trace amount of zirconium, tantalum, or titanium for hardening, the stent is annealed under vacuum in a substantially oxygen-free environment. The vacuum is preferably maintained at pressure less than 10−4 millibars, oxygen-content less than about 80 parts per million, and the annealing temperature exceeds 400° C. for at least one hour, and is preferably kept in a range from about 1100-1200° C. for several hours. This may be followed by applying a surface layer of oxide, such as iridium oxide, with a thickness of 299-300 nm to the stent.
摘要:
Monolithic metal oxide structures, and processes for making such structures, are disclosed. The structures are obtained by heating a metal-containing structure having a plurality of surfaces in close proximity to one another in an oxidative atmosphere at a temperature below the melting point of the metal while maintaining the close proximity of the metal surfaces. Exemplary structures of the invention include open-celled and closed-cell monolithic metal oxide structures comprising a plurality of adjacent bonded corrugated and/or flat layers, and metal oxide filters obtained from a plurality of metal filaments oxidized in close proximity to one another.