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公开(公告)号：US11020777B2
公开(公告)日：2021-06-01
申请号：US16700940
申请日：2019-12-02
申请人： Semes Co., Ltd.
发明人： Young Hun Lee , Eui Sang Lim , Jae Myoung Lee
IPC分类号： B08B7/00 , H01L21/67 , H01L21/687 , B08B3/02 , F26B5/00 , F26B3/04 , F26B11/18 , F26B21/14 , H01L21/02
摘要： A substrate treating apparatus is disclosed. The apparatus may include a housing including an upper body and a lower body coupled to each other to define a treatment space, the lower body being provided below the upper body, a supporting unit coupled to the upper body, the supporting unit supporting an edge of a substrate disposed in the treatment space, a fluid supplying unit configured to supply fluid into the treatment space, a sealing member provided between and in contact with the upper and lower bodies, the sealing member hermetically isolating the treatment space from an outer space, and an isolation plate installed between the sealing member and the supporting unit. The isolation plate may be provided to face the sealing member.
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公开(公告)号：US10281210B2
公开(公告)日：2019-05-07
申请号：US14773055
申请日：2014-02-28
摘要： According to one embodiment, a substrate processing apparatus (1) includes a table (4) configured to support a substrate W, a solvent supply unit (8) configured to supply a volatile solvent to a surface of the substrate W on the table (4), and an irradiator (10) configured to emit light to the substrate W, which has been supplied with the volatile solvent, and function as a heater that heats the substrate W such that a gas layer is formed on the surface of the substrate W to make the volatile solvent into a liquid ball. Thus, it is possible to dry the substrate successfully as well as to suppress pattern collapse.
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公开(公告)号：US09695544B2
公开(公告)日：2017-07-04
申请号：US13437501
申请日：2012-04-02
摘要： A laundry dryer is provided with a modular air recirculation subassembly fitted beneath a rotatable drum of the dryer. The subassembly has an air recirculation passage provided between an air supply passage and an air exhaust passage of the dryer. The air recirculation subassembly further has a flow directing flap at the juncture of the air inlet passage and the air recirculation passage to direct the recirculation air flow toward a heater and away from an inlet end of the air supply passage. The air recirculation subassembly may include a filter positioned across the air recirculation passage upstream of the heater, which filter is removable through the air exhaust passage. The subassembly may further include a heat exchanger to transfer heat from the warmer air exiting the exhaust passage to the cooler air entering the air supply passage, and a recirculation air flow regulating flap.
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公开(公告)号：US09273902B2
公开(公告)日：2016-03-01
申请号：US13548869
申请日：2012-07-13
CPC分类号： F26B11/18 , A21B1/46 , F26B21/08 , F26B21/10 , F26B21/12 , F26B25/12 , F27B17/0016 , F27D3/00
摘要： A curing oven includes a set of pivoting, rotating trays within a curing chamber. The trays are attached to a mechanism that rotates the trays through a curing cycle, and the speed and timing of the rotation may be set by an operator, as desired. In a preferred embodiment, the oven includes a plurality of heating elements, a commercial dehumidifier, a recirculating fan and system, temperature and humidity sensors, and a series of pivoting trays attached to a motorized rotational assembly. The oven is controlled by a various controllers, which may be programmed to set the temperature, humidity levels, rotation speed and cycle time, and other aspects of oven operation. A loading and unloading chamber is effectively sealed off from the curing chamber within the oven, preventing or reducing a transfer of air between the curing chamber and the ambient air outside of the oven.
摘要翻译： 固化炉包括固化室内的一组枢转的旋转盘。 托盘附接到使托盘旋转固化循环的机构，并且可以根据需要由操作者设定旋转的速度和时间。 在优选实施例中，烤箱包括多个加热元件，商业除湿器，再循环风扇和系统，温度和湿度传感器，以及连接到电动旋转组件的一系列枢轴托盘。 烤箱由各种控制器控制，其可以被编程以设置温度，湿度水平，转速和循环时间以及烤箱操作的其它方面。 加载和卸载室与烘箱内的固化室有效地密封，防止或减少固化室与烘箱外部环境空气之间的空气传输。
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5.发明申请公开(公告)号：US20150292799A1
公开(公告)日：2015-10-15
申请号：US14683676
申请日：2015-04-10
申请人： Claire MAUREL
发明人： Claire MAUREL
摘要： A part drying device, includes a processing chamber having a side wall closed at both ends by a bottom and an upper wall to form an enclosure, the interior of the enclosure being accessible by an opening which can be sealingly closed, a liquid outlet connected to the processing chamber to collect the liquid supplied during the drying of the part, a power supply, an air supply supplying unit for blowing air in the processing chamber to blow air on the part arranged in the processing chamber, wherein the part drying device further includes elements for blowing air on the inner walls of the processing chamber.
摘要翻译： 一种部分干燥装置，包括处理室，其侧壁通过底部和上壁在两端封闭以形成外壳，外壳的内部可通过可密封关闭的开口接近，液体出口连接到 所述处理室用于收集在所述部件的干燥期间供应的液体;电源;空气供应供应单元，用于在所述处理室中吹送空气以在设置在所述处理室中的部件上吹送空气，其中所述部件干燥装置还包括 用于在处理室的内壁上吹送空气的元件。
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6.发明授权公开(公告)号：US08123046B2
公开(公告)日：2012-02-28
申请号：US12589412
申请日：2009-10-23
CPC分类号： B01D29/014 , B01D29/843
摘要： A method and apparatus is provided for removing fluids, particularly entrained and/or adherent fluids, from drill cuttings created during the well drilling process. An apron assembly collects drill cuttings and deposits such cuttings on a central rotor having multiple distinct chambers. A first chamber is loaded with drill cuttings. The central rotor thereafter cycles to a second position wherein a pressure seal is formed around the loaded first chamber. An air knife or similar device is used to blast compressed gas at the cuttings in the sealed chamber and force the cuttings against a screen. Solid components of the cuttings remain in the sealed chamber, while liquid components pass through the screen and are collected using an auger assembly. Following such separation, the rotor is cycled again, allowing dried cuttings to empty from the first chamber. The process is repeated for each chamber of the rotor.
摘要翻译： 提供了一种用于从钻井过程中产生的钻屑去除流体，特别是夹带和/或附着流体的方法和装置。 围裙组件收集钻屑并将这些切屑沉积在具有多个不同腔室的中心转子上。 第一个室装有钻屑。 然后中心转子循环到第二位置，其中在所加载的第一室周围形成压力密封。 使用气刀或类似装置在密封室中的切屑处喷射压缩气体，并将切屑压在屏幕上。 切屑的固体组分保留在密封室中，而液体组分通过筛网并使用螺旋钻组件收集。 在这种分离之后，转子再次循环，允许干燥的切屑从第一室排出。 对于转子的每个室重复该过程。
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公开(公告)号：US06922912B2
公开(公告)日：2005-08-02
申请号：US10476027
申请日：2002-04-25
CPC分类号： A47L15/486 , A47L15/4291 , D06F58/04 , D06F58/20 , F26B5/04 , F26B11/181 , F26B23/004 , Y02B30/52 , Y02B40/44 , Y02P70/405
摘要： The invention provides drying apparatus including a first chamber for receiving articles to be dried and having an outlet, a second chamber having an outlet, and a fan having a fan inlet and a fan outlet, the fan inlet communicating with the outlet of the first chamber and the fan outlet communicating with the second chamber. The apparatus further includes a vacuum pump communicating with the outlet of the second chamber so that transfer of thermal energy can take place between the first and second chambers. The invention also provides a method of drying including placing articles into a first chamber, evacuating a significant proportion of the air from the first chamber and from a second chamber, evacuating water vapor from the first chamber to the second chamber, allowing the water vapor to condense in the second chamber, and transferring thermal energy from the second chamber to the first chamber.
摘要翻译： 本发明提供了一种干燥装置，包括：第一室，用于接收要干燥的物品并具有出口，具有出口的第二室和具有风扇入口和风扇出口的风扇，风扇入口与第一室的出口连通 并且所述风扇出口与所述第二室连通。 该装置还包括与第二室的出口连通的真空泵，以便能够在第一和第二室之间进行热能转移。 本发明还提供了一种干燥方法，包括将物品放置在第一室中，将大部分空气从第一室排出并从第二室排出，将水蒸气从第一室排出到第二室，允许水蒸汽 在第二室中冷凝，并将热能从第二室传递到第一室。
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8.发明申请Substrate drying method, substrate drying apparatus, and semiconductor device manufacturing method 审中-公开基板干燥方法，基板干燥装置以及半导体装置的制造方法公开(公告)号：US20050050760A1
公开(公告)日：2005-03-10
申请号：US10868031
申请日：2004-06-16
申请人： Masamitsu Itoh
发明人： Masamitsu Itoh
IPC分类号： F26B11/18 , F26B21/14 , H01L21/00 , H01L21/304 , F26B17/00
CPC分类号： H01L21/67034
摘要： A substrate drying method according to the present invention comprises disposing a flat plate which has an opening and which is equal to a substrate or larger than the substrate above the substrate to have a predetermined space between the flat plate and the substrate and discharging a gas from the opening, and moving, by the gas, a removal target on the substrate outside the substrate.
摘要翻译： 根据本发明的基板干燥方法包括设置具有开口并且等于基板的平板或大于基板上方的基板的平板，以在平板和基板之间具有预定的空间，并将气体从 所述开口和由所述气体移动在所述基板外部的所述基板上的去除靶。
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公开(公告)号：US6068874A
公开(公告)日：2000-05-30
申请号：US354747
申请日：1994-12-08
申请人： Vladimir Grocholski
发明人： Vladimir Grocholski
IPC分类号： A23B4/03 , A23B4/052 , A23B7/02 , A23L3/40 , F26B11/18 , F26B21/04 , F26B21/06 , F26B21/14 , F26B25/06 , A23B7/00 , F26B3/00
CPC分类号： A23B4/052 , A23B4/031 , A23B7/0205 , A23L3/40 , F26B11/181 , F26B21/04 , F26B21/06 , F26B21/14 , F26B25/06
摘要： A dehydration apparatus and process utilizing a closed system are provided and enable substantial dehydration of biological products while enabling retention of the essential flavor and fragrance of the natural product. The apparatus comprises a heat exchanger and dehydration chamber connected in closed fashion by appropriate conduits or ducting. Appropriate blowers are provided, as are controls for the system parameters of the dehydration process.
摘要翻译： 提供了一种利用封闭系统的脱水装置和方法，能够使生物制品实质上脱水，同时保持天然产物的基本香味和芳香。 该装置包括一个热交换器和脱水室，通过适当的导管或导管以封闭的方式连接。 提供适当的鼓风机，以及脱水过程的系统参数的控制。
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公开(公告)号：US5997930A
公开(公告)日：1999-12-07
申请号：US979397
申请日：1997-11-26
申请人： John Hugh Kendall , Ranvir Biki Mohindra , Duane Stephen Rutherford , Satoru Satake , Sigeharu Kanamoto , Katsuyuki Kumamoto
发明人： John Hugh Kendall , Ranvir Biki Mohindra , Duane Stephen Rutherford , Satoru Satake , Sigeharu Kanamoto , Katsuyuki Kumamoto
CPC分类号： F26B11/181 , A23L7/196 , A23L7/1975 , A47J27/16
摘要： The field of the invention relates to a method for processing food products to prepare the food products for packaging. The methods involve presteaming, steeping, steam cooking, and then drying the food products. The method reveals pressure cooking with a pressure that is maintained below 15 psi, and in a steam vessel. Chemical additives may be added to the food products during processing. The apparatus includes a conveyor, steeping tanks as needed, and a water recirculation system. A dryer which includes a rotating barrel adapted for agitation of the food products during cooking is also included.
摘要翻译： 本发明的领域涉及一种加工食品以制备用于包装的食品的方法。 这些方法包括预蒸汽，浸泡，蒸汽烹饪，然后干燥食品。 该方法显示出压力烹调的压力保持在15psi以下，并在蒸汽容器中。 化学添加剂可以在加工过程中加入到食品中。 该设备包括输送机，根据需要的浸泡罐和水循环系统。 还包括一个包括适于在烹饪期间搅动食品的旋转筒的烘干机。
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