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1.
公开(公告)号:US12196837B2
公开(公告)日:2025-01-14
申请号:US18515444
申请日:2023-11-21
Applicant: SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY , SHANDONG YUFEI TRANSMISSION TECHNOLOGY CO., LTD
Inventor: Wenhong Li , Yi Zhang , Fansheng Meng , Tianyu Zhu , Hongmei Tang , Luqun Zhu , Jianyu Guo , Wenlong Zhang , Xixin Liu
Abstract: The present disclosure provides a method of perceiving a position and pose of a hydraulic support group based on multi-point ranging and belongs to the field of test or measurement technologies unlisted in other categories. The method uses a hydraulic support group. The hydraulic support group includes multiple juxtaposed hydraulic supports. The method includes: with a plane above a base as a reference plane, establishing a reference coordinate system; perceiving a relative position of the base and a canopy of the hydraulic supports and perceiving a position and pose of a single hydraulic support; when the hydraulic supports have axial offset and roll phenomenon, performing offset amount calculation; based on the perception of the position and pose of single hydraulic supports, performing perception on the position and pose of the hydraulic support group. In the present disclosure, the measurement devices achieve conversion of pure distance information into three-dimensional pose information of an object in time and space by using logical combination of several real-time ranging terminals, leading to simple structure; there is no interference between measurement devices, and there is wireless connection between a signal transmitting device and a signal receiving device, resulting in no rendezvous point and being free from impact of frictional force.
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公开(公告)号:US20240426604A1
公开(公告)日:2024-12-26
申请号:US18212434
申请日:2023-06-21
Applicant: Honeywell International Inc.
Inventor: Greg Reynen
IPC: G01B15/00 , G01B21/16 , G01N23/20025
Abstract: Sensors used in sheet manufacturing environments can be sensitive to the gap between the scanner heads. Nuclear gauges measure both the sheet product and gas in the column between the scanner heads. The gap distance can affect the measurement in a linear or non-linear fashion depending on the sensing principle High frequency vibrations can cause the sensor devices therein to move. Techniques for controlling the sensor gap between operative surfaces on dual scanner heads during measurement operation employs a closed-loop control where piezoelectric actuators are used to maintain a constant gap throughout the scan by closing the error signal on the gap measurement sensor. A system for measuring a property of a continuous sheet includes dual scanner heads housing radiation emitters and receivers. Gap measurement signals energize the actuators that adjust the position of one or both sensor devices to maintain the gap at a desired distance.
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公开(公告)号:US12092966B2
公开(公告)日:2024-09-17
申请号:US18386846
申请日:2023-11-03
Applicant: KLA Corporation
Inventor: Amnon Manassen , Nadav Gutman , Frank Laske , Andrei V. Shchegrov
CPC classification number: G03F7/706845 , G01B11/272 , G01B15/00 , G03F7/70655 , G01B2210/56
Abstract: A system and method are disclosed for generating metrology measurements with second sub-system such as an optical sub-system. The method may include performing a training and a run-time operation. The training may include receiving first metrology data for device features from the first metrology sub-system (e.g., optical); generating first metrology measurements (e.g., critical dimensions, etc.); binning the device features into two or more device bins based on the first metrology measurements; and identifying representative metrology targets for the two or more device bins based on distributions of the first metrology measurements. The run-time operation may include receiving run-time metrology data (e.g., optical) of the representative metrology targets; and generating run-time metrology measurements based on the run-time metrology data.
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4.
公开(公告)号:US12080610B2
公开(公告)日:2024-09-03
申请号:US17044963
申请日:2020-09-04
Applicant: KLA CORPORATION
Inventor: Lilach Saltoun , Daria Negri
CPC classification number: H01L22/20 , G01B15/00 , G03F7/70633 , G03F7/70655 , G03F7/706837
Abstract: A wavelet-analysis system and method for use in fabricating semiconductor device wafers, the system including a misregistration metrology tool operative to measure at least one measurement site on a wafer, thereby generating an output signal, and a wavelet-based analysis engine operative to generate at least one wavelet-transformed signal by applying at least one wavelet transformation to the output signal and generate a quality metric by analyzing the wavelet-transformed signal.
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公开(公告)号:US20240210169A1
公开(公告)日:2024-06-27
申请号:US18523489
申请日:2023-11-29
Applicant: Siemens Healthcare GmbH
Inventor: Alois Regensburger , Daniel Ploss
IPC: G01B15/00
CPC classification number: G01B15/00
Abstract: An X-ray device is provided that includes: an X-ray source configured to provide the X-ray radiation; an X-ray detection unit configured to detect secondary X-ray radiation at least partially transmitted through the object and/or at least partially dispersed by the object, and to provide at least one detector signal as a function of the detected secondary X-ray radiation; and an X-ray analyzer unit configured to analyze the at least one detector signal in order to determine a structure of the object at least in part. The X-ray detection unit is further configured to receive a radio signal, e.g., from a transmitter unit of the treatment instrument positioned in a predefined area of the object and, as a function of the detected radio signal, to provide at least one received signal or analysis by a radio analyzer unit to determine a position of the treatment instrument in relation to the object.
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6.
公开(公告)号:US20240133683A1
公开(公告)日:2024-04-25
申请号:US18460929
申请日:2023-09-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Inho KWAK , Jinsun KIM , Moosong LEE , Seungyoon LEE , Jeongjin LEE , Chan HWANG , Dohyeon PARK , Yeeun HAN
IPC: G01B15/00
CPC classification number: G01B15/00
Abstract: In an overlay measurement method, an overlay mark having programmed overlay values is provided. The overlay mark is scanned with an electron beam to obtain a voltage contrast image. A defect function that changes according to the overlay value is obtained from voltage contrast image data. Self-cross correlation is performed on the defect function to determine an overlay.
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7.
公开(公告)号:US20240093985A1
公开(公告)日:2024-03-21
申请号:US17946935
申请日:2022-09-16
Applicant: KLA Corporation
Inventor: Nimrod Shuall , Jordan Pio , Frank Laske , Stefan Eyring , Ohad Bachar
Abstract: Systems and methods for acquiring measurements of structures of a bonded sample are disclosed. Such systems and methods may include determining a first registration measurement of a first registration structure and a first interface target structure of a first sample, and a second registration measurement of a second sample prior to coupling the samples together. Such systems and methods may include, after such a coupling of the samples, determining a third registration measurement of the coupled sample at least partially by measuring the first registration structure through the top face of the first sample. Such systems and methods may include acquiring an overlay measurement based on the first registration measurement, the second registration measurement, and the third registration measurement. Such systems and methods may include adjusting an inter-sample coupling recipe based on the overlay measurement, where the inter-sample coupling recipe may include a final bonding recipe.
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公开(公告)号:US11927436B2
公开(公告)日:2024-03-12
申请号:US17404097
申请日:2021-08-17
Applicant: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP
Inventor: Jaime E. Llinas , Saravanan Rathakrishnan , Yanyan Xia , ZeLin Wu , Yanli Li , JunHui Li , Jian Miremadi
IPC: G01B15/00 , G01B9/04 , G01B11/02 , G01N21/956 , G01B21/04
CPC classification number: G01B15/00 , G01B9/04 , G01B11/02 , G01N21/956 , G01B21/042 , G01N2021/95638 , G01N2021/95669
Abstract: Example implementations relate to an inspection method for training a measurement machine to accurately measure side joint lengths and detecting a defect among a plurality of solder joints. The method includes receiving a first data representing the side joint lengths of the plurality of solder joints measured by a first measurement machine and a second data representing the side joint lengths measured by a second measurement machine. Further, the method includes determining a correlation value based on a statistical analysis of a relationship between the first data and the second data. The method further includes updating an algorithm used by the first measurement machine to measure the side joint lengths, based on the correlation value to reduce deviation between the first data and the second data. Later, the updated algorithm is used as a dimensional metrology in the first measurement machine for detecting the defect in the solder joints.
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公开(公告)号:US11839172B2
公开(公告)日:2023-12-12
申请号:US17096536
申请日:2020-11-12
Applicant: Precision Planting LLC
Inventor: Dale Koch , Jeremy Hodel , Timothy Kater , Douglas Urbaniak
IPC: A01B76/00 , A01C5/06 , A01B79/00 , A01B49/02 , A01B49/06 , A01B63/32 , A01C7/04 , G01B7/26 , G01B15/00 , A01C7/20
CPC classification number: A01B76/00 , A01B49/027 , A01B49/06 , A01B63/32 , A01B79/005 , A01C5/064 , A01C5/066 , A01C5/068 , A01C7/042 , A01C7/203 , A01C7/205 , G01B7/26 , G01B15/00
Abstract: A trench closing sensor adapted to mount to an agricultural implement to detect whether a seed trench is sufficiently closed with soil to ensure good seed to soil contact. The trench closing sensor may also detect the amount of compaction of the soil over the seed within the seed trench. The trench closing sensor may be in the form of a seed firmer from which a drag wire extends. As the open seed trench and drag wire are covered with soil, instrumentation measures or detects whether the seed trench is being adequately closed with soil by measuring the amount of force required to pull the wire through the soil or by measuring the amount of strain, pulling force or tension in the wire or by measuring the amount of soil pressure acting on the wire. The trench closing sensor may include other sensors for detecting soil characteristics.
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公开(公告)号:US11839171B2
公开(公告)日:2023-12-12
申请号:US16998693
申请日:2020-08-20
Applicant: Precision Planting LLC
Inventor: Michael Strnad , Jeremy Hodel , Dale Koch , Todd Swanson , Dillon Sloneker
IPC: A01B76/00 , A01C5/06 , A01B79/00 , A01B49/02 , A01B49/06 , A01B63/32 , A01C7/04 , G01B7/26 , G01B15/00 , A01C7/20
CPC classification number: A01B76/00 , A01B49/027 , A01B49/06 , A01B63/32 , A01B79/005 , A01C5/064 , A01C5/066 , A01C5/068 , A01C7/042 , A01C7/203 , A01C7/205 , G01B7/26 , G01B15/00
Abstract: A row unit downforce system including: a downforce actuator in operational communication with the row unit and constructed and arranged to apply supplemental downforce to the row unit and opening disks; a monitoring system comprising at least one furrow depth sensor constructed and arranged to generate furrow depth values; and a control system module, wherein the control system module is constructed and arranged to generate actuator command signals in response to the furrow depth values.
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