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公开(公告)号：US12124172B2
公开(公告)日：2024-10-22
申请号：US17634702
申请日：2020-08-05
申请人： ASML Holding N.V.
发明人： Alexander Kremer
CPC分类号： G03F7/70558 , G01J3/021 , G01J3/0291 , G01J3/4406 , G03F7/7085
摘要： The present disclosure provides an ultraviolet radiation control system and a related method for control an ultraviolet radiation in a lithographic apparatus. The ultraviolet radiation control system comprises a housing; a conversion crystal (540), disposed on or in the housing, configured to convert an ultraviolet radiation to a fluorescent radiation; a plurality of photodetectors (550) configured to detect an intensity of a scattered portion of the fluorescent radiation; and at least one diffusive surface (545), disposed on or in the conversion crystal, configured to increase the intensity of the scattered portion of the fluorescent radiation.
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公开(公告)号：US12123827B2
公开(公告)日：2024-10-22
申请号：US17501600
申请日：2021-10-14
申请人： TAMRON CO., LTD.
发明人： Jie Li , Shunya Fukui
CPC分类号： G01N21/33 , G01J3/0205 , G01J3/42
摘要： In a plasmonic structure, a first conductor layer, a dielectric layer, and a second conductor layer are stacked in this order. The second conductor layer includes a plurality of conductor patterns that is two-dimensionally and periodically arranged, each of the plurality of conductor patterns having a circular shape or a regular polygonal shape. A diameter D of a circle circumscribed on each of the plurality of conductor patterns satisfies 200 nm≤D≤800 nm. A thickness g of the dielectric layer and the diameter D satisfy 0.3≤g/D≤0.6.
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公开(公告)号：US12111211B2
公开(公告)日：2024-10-08
申请号：US18323463
申请日：2023-05-25
申请人： VIAVI Solutions Inc.
发明人： Michael Klimek
CPC分类号： G01J3/2823 , G01J3/0294 , G01J3/2803 , G01J2003/2826
摘要： An optical device may comprise an array of sensor elements that includes a plurality of pixels and a multispectral filter disposed on the array of sensor elements. The multispectral filter may be configured to pass a first transmission percentage of light of a particular spectral range to a first set of pixels of the plurality of pixels and pass a second transmission percentage of light of the particular spectral range to a second set of pixels of the plurality of pixels.
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公开(公告)号：US12111210B2
公开(公告)日：2024-10-08
申请号：US17859912
申请日：2022-07-07
申请人： Apple Inc.
IPC分类号： G01J3/02 , G01J3/10 , G01J3/18 , G01J3/32 , G01J3/45 , G02B6/293 , G02B6/42 , G02B27/10 , G02F1/21
CPC分类号： G01J3/0297 , G01J3/10 , G01J3/108 , G01J3/1809 , G01J3/32 , G01J3/45 , G02B6/2938 , G02B6/4215 , G02B27/10 , G01J2003/102 , G02F1/212
摘要： Configurations for light source modules and methods for mitigating coherent noise are disclosed. The light source modules may include multiple light source sets, each of which may include multiple light sources. The light emitted by the light sources may be different wavelengths or the same wavelength depending on whether the light source module is providing redundancy of light sources, increased power, coherent noise mitigation, and/or detector mitigation. In some examples, the light source may emit light to a coupler or a multiplexer, which may then be transmitted to one or more multiplexers. In some examples, the light source modules provide one light output and in other examples, the light source modules provide two light outputs. The light source modules may provide light with approximately zero loss and the wavelengths of light may be close enough to spectroscopically equivalent respect to a sample and far enough apart to provide coherent noise mitigation.
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公开(公告)号：US12104957B2
公开(公告)日：2024-10-01
申请号：US17620408
申请日：2020-06-25
申请人： Protea Ltd
发明人： Chris Daw , Robin Hutchinson
IPC分类号： G01J3/427 , G01J3/02 , G01J3/10 , G01J3/12 , G01N21/33 , G01N21/3504 , G01N33/00 , G01N21/31
CPC分类号： G01J3/427 , G01J3/0218 , G01J3/108 , G01J3/12 , G01N21/33 , G01N21/3504 , G01N33/0037 , G01N33/0042 , G01J2003/102 , G01J2003/1213 , G01N2021/3155 , G01N2201/08
摘要： The invention relates to a photometer (30) for analysing the composition of a sample gas. The photometer comprises an infra-red (IR) source (20) configured to direct a first plurality of pulses (40) of IR radiation through the sample gas to an IR detector (26), at least two of the first plurality of pulses being of different wavelength. The photometer further comprises an ultraviolet (UV) source (32) configured to generate a second plurality of pulses (38) of UV radiation for conveyance to a UV detector (36), at least two of the second plurality of pulses being of different wavelength. A path selection arrangement (22, 42-50) is configured to selectively convey different ones of the second plurality of pulses (38) to one of the sample gas and the UV detector (36). The photometer further comprises processing circuitry coupled to the IR source (20), the UV source (32), the IR detector (26), the UV detector (36) and the path selection arrangement (22, 42-50). The processing circuitry is configured to (i) select the wavelength to be used for a given UV pulse of the second plurality of pulses (38), (ii) receive a plurality of detection signals from each of the IR detector (26) and the UV detector (36) and (iii) based on the detection signals, determine a concentration of at least one component of the sample gas. A method for analysing the composition of a sample gas is also disclosed.
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公开(公告)号：US12104954B2
公开(公告)日：2024-10-01
申请号：US17844919
申请日：2022-06-21
发明人： Suyeon Lee , Unjeong Kim , Hojung Kim
IPC分类号： G01J3/32 , G01J3/02 , G01J3/10 , G01J3/28 , G01N21/01 , G01N21/17 , G01N21/25 , G01N21/31 , G01N21/33
CPC分类号： G01J3/32 , G01J3/0213 , G01J3/10 , G01J3/2803 , G01J3/2823 , G01N21/255 , G01N21/314 , G01N21/33 , G01J2003/2813 , G01J2003/2826 , G01N2021/0168 , G01N2021/1765 , G01N2021/317 , G01N2201/0221
摘要： An apparatus for detecting an ultraviolet blocking material includes a light receiver configured to acquire detection light from a target object; a spectrum signal generator configured to generate spectrum signals based on the detection light; and a processor configured to: select a reference wavelength from a range from about 290 nm to about 400 nm, and detect an ultraviolet blocking material based on a first spectrum signal of a first wavelength less than the reference wavelength and a second spectrum signal of a second wavelength greater than the reference wavelength, the first spectrum signal and the second spectrum signal being generated by the spectrum signal generator.
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公开(公告)号：US12098957B2
公开(公告)日：2024-09-24
申请号：US17694682
申请日：2022-03-15
发明人： Kun Yuan , Yang Zhang , Jian Wang
CPC分类号： G01J3/524 , G01J3/0229 , G01J3/0251 , G01J3/0267 , G01J3/0272 , G01J3/0291 , G01J3/10 , G01J3/46 , G01J3/465 , G01N21/4738 , G01N21/474 , G01J2003/467 , G01R33/02 , G01R33/072
摘要： Disclosed are a colorimeter and a reflectivity measuring method based on a multichannel spectrum. The colorimeter includes a main unit and a calibration box, wherein the main unit includes an integrating sphere, a light source and a main sensor, a detection hole is formed in one side of a top of the integrating sphere, a light-through hole is formed in a side of the integrating sphere, and a measuring port is formed in a bottom of the integrating sphere, the light source is arranged outside the light-through hole, and the main sensor is arranged outside the detection hole; the calibration box includes a housing and a white board arranged at a top of the housing, the white board is correspondingly matched with the measuring port, and the calibration box is connected with the main unit; the sensor is a multichannel spectral sensor.
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公开(公告)号：US20240302211A1
公开(公告)日：2024-09-12
申请号：US18599387
申请日：2024-03-08
发明人： Masaki ITO , Takeshi TOKUDA
CPC分类号： G01J3/06 , G01J3/0202 , G01J2003/061 , G01J2003/062
摘要： A color measurement apparatus to which a colorimeter that measures a color of a color measurement target is configured to be attached, includes a support base of the color measurement target, a carriage that supports the colorimeter, a gantry that supports the carriage, a first scanning mechanism that causes the carriage to perform scanning in a first direction on the support base, and a second scanning mechanism that causes the gantry to perform scanning in a second direction, in which the first scanning mechanism includes a first motor that generates a driving force for causing the carriage to perform scanning in the first direction, and a first transmission mechanism portion that transmits the driving force from the first motor to the carriage, and the first motor overlaps the gantry in a third direction.
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9.发明公开公开(公告)号：US20240295437A1
公开(公告)日：2024-09-05
申请号：US18647506
申请日：2024-04-26
发明人： Lei Zhou
CPC分类号： G01J3/28 , G01J3/0224 , G01J3/0237 , H01S3/1305
摘要： An optical wavelength measurement apparatus and method may be used to expand a wavelength range that can be detected by using an optical wavelength measurement technology. The measurement apparatus may respectively superimpose to-be-measured light with optical components that are in an optical frequency comb and that correspond to each of a plurality of comb frequency values, to obtain a multiplexed optical signal corresponding to each optical component, and then determine a measured value of a wavelength of the to-be-measured light based on an electrical signal of a multiplexed optical signal corresponding to a target optical component obtained by an electrical beat frequency. The electrical signal corresponding to the target optical component includes a beat frequency signal.
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公开(公告)号：US12078539B2
公开(公告)日：2024-09-03
申请号：US18375404
申请日：2023-09-29
申请人： MIFTEK CORPORATION
CPC分类号： G01J3/4406 , G01J3/0218 , G01J3/0227
摘要： A measurement system is disclosed which includes a flow chamber configured to propagate a sample in a flow stream, one or more optical sources configured to irradiate the sample in the flow stream, one or more detector systems each configured to receive resultant light from the sample and, in response, generate a photon signal, the one or more detector systems each including one or more photon sensors each adapted to generate an electronic pulse in response to receiving a photon and a circuit operating in the giga hertz supporting the one or more photon sensors thus configured to count each individual photon in the resultant light from the sample.
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