公开(公告)号：US20240203767A1

公开(公告)日：2024-06-20

申请号：US18081897

申请日：2022-12-15

申请人： APPLIED MATERIALS, INC.

发明人： Venkata Raghavaiah Chowdhary Kode

IPC分类号： H01L21/67 ,  B25J11/00 ,  B25J19/02 ,  G01P1/00 ,  G01P15/00 ,  G06F3/14 ,  G08B21/18

CPC分类号： H01L21/67276 ,  B25J11/0095 ,  B25J19/02 ,  G01P1/00 ,  G01P15/00 ,  G06F3/14 ,  G08B21/182

摘要： A system includes a controller, a substrate transfer device including one or more moveable members, and a vibration sensor assembly coupled to a member of the one or more moveable members. The vibration sensor assembly includes an accelerometer configured to detect vibration of the substrate transfer device and a processing device coupled to the accelerometer. The processing device is to receive vibration data from the accelerometer. The processing device is further to determine a vibration frequency peak of the vibration data. The vibration frequency peak corresponds to a critical frequency associated with the substrate transfer device. The processing device is further to determine that the vibration frequency peak exceeds a threshold magnitude, responsive to which the processing device is further to cause a data signal indicative of the vibration frequency peak to be transmitted to the controller.

公开(公告)号：US20240093994A1

公开(公告)日：2024-03-21

申请号：US18467306

申请日：2023-09-14

申请人： SEIKO EPSON CORPORATION

发明人： Yoshiyuki MATSUURA

IPC分类号： G01C19/56 ,  G01P1/00 ,  G01P15/125 ,  G01P15/18

CPC分类号： G01C19/56 ,  G01P1/00 ,  G01P15/125 ,  G01P15/18

摘要： An inertial measurement device includes: a first case and a second case; a board that is disposed in a space formed by the first case and the second case, that includes a first surface and a second surface, and in which a first inertial sensor is disposed at the first surface; a first filling material configured to fill between the first surface of the board and the first case and between the first inertial sensor and the first case; and a second filling material configured to fill between the second surface of the board and the second case.

公开(公告)号：US11906542B2

公开(公告)日：2024-02-20

申请号：US17089412

申请日：2020-11-04

申请人： Elektrobit Automotive Gmbh

发明人： Martin Schauer ,  Manuel Kraus ,  Lucila Patino Studencki ,  Christian Siller ,  Christian Pfeuffer ,  Martin Nippe ,  Ghazaleh Baleghkalam ,  Sebastian Ohl

IPC分类号： G01P21/00 ,  B60R11/00 ,  G01C19/00 ,  G01C25/00 ,  G01P1/00 ,  G01P13/00 ,  G01P15/08 ,  G01P15/18

CPC分类号： G01P21/00 ,  B60R11/00 ,  G01C19/00 ,  G01C25/005 ,  G01P1/00 ,  G01P13/00 ,  G01P15/08 ,  G01P15/18

摘要： A system for checking an inertial measurement unit of a vehicle, in particular a land vehicle, during driving includes the inertial measurement unit having: a first acceleration sensor configured to measure a translational acceleration along a first sensor axis and/or a first rate-of-rotation sensor configured to measure a rate of rotation about the first sensor axis and also a second acceleration sensor configured to measure a translational acceleration along a second sensor axis and/or a second rate-of-rotation sensor configured to measure a rate of rotation about the second sensor axis. A sensing device senses a movement of the vehicle in a first vehicle direction and/or about the first vehicle direction. Both the first sensor axis and the second sensor axis are tilted with respect to the first vehicle direction.

公开(公告)号：US11899039B2

公开(公告)日：2024-02-13

申请号：US17807319

申请日：2022-06-16

申请人： QUALCOMM Technologies, Inc.

发明人： Robert J. Littrell

IPC分类号： G01P15/09 ,  H04R19/04 ,  G01P1/00 ,  H04R17/00 ,  H10N30/30 ,  H10N30/853 ,  H10N30/80 ,  H10N30/87

CPC分类号： G01P15/09 ,  G01P1/00 ,  H04R17/00 ,  H04R19/04 ,  H10N30/302 ,  H10N30/306 ,  H10N30/802 ,  H10N30/853 ,  H10N30/877 ,  H04R2201/003

摘要： A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

公开(公告)号：US11796561B2

公开(公告)日：2023-10-24

申请号：US17880526

申请日：2022-08-03

申请人： MURATA MANUFACTURING CO., LTD.

发明人： Akira Konno ,  Yoshitaka Kato ,  Ville-Pekka Rytkonen

IPC分类号： G01P15/125 ,  G01P1/00 ,  G01P15/18

CPC分类号： G01P15/125 ,  G01P1/003 ,  G01P15/18

摘要： The present invention relates to capacitive micromechanical accelerometers, and in particular to acceleration sensors with movable rotors which may rotate out of a substrate plane when the accelerometer undergoes movement with an acceleration component perpendicular to the substrate plane. The capacitive micromechanical accelerometer includes additional damping springs to reduce unwanted movement of the rotor in the substrate plane, thereby reducing the parasitic capacitance that results from motion of the rotor in the substrate plane. The damping springs are vertically recessed with respect to other components of the accelerometer in order to minimise the effect of the damping springs on movement of the rotor out of the substrate plane.

公开(公告)号：US20230273236A1

公开(公告)日：2023-08-31

申请号：US18040185

申请日：2021-07-15

申请人： Robert Bosch GmbH

发明人： Joachim Kreutzer ,  David Slogsnat ,  Gabriele Cazzaniga ,  Massimiliano Musazzi ,  Timon Brueckner

IPC分类号： G01P15/125 ,  G01P1/00

CPC分类号： G01P15/125 ,  G01P1/00

摘要： A method for assessing the state of a sensor. The sensor comprises a deflectable micromechanical sensor structure for detecting a physical input variable and converting the physical input variable into an electrical sensor signal. A medium surrounding the sensor acts on the micromechanical sensor structure. The micromechanical sensor structure is deflectable using an excitation signal. The method includes: generating an excitation signal using a driver unit; outputting the excitation signal to the micromechanical sensor structure; deflecting the micromechanical sensor structure using the excitation signal; detecting a response behavior of the micromechanical sensor structure in response to the excitation signal; comparing the response behavior to a reference behavior to determine a measure of deviation for the response behavior in relation to the reference behavior; and assessing, based on the measure of deviation, the state of the sensor with respect to the presence of a deposit.

公开(公告)号：US20230261669A1

公开(公告)日：2023-08-17

申请号：US17674788

申请日：2022-02-17

申请人： INVENSENSE, INC.

发明人： Gabriele Pelli

IPC分类号： H03M3/00 ,  H03F3/45 ,  G01P15/08 ,  G01C19/5712 ,  G01P1/00

CPC分类号： H03M3/376 ,  H03M3/458 ,  H03F3/45 ,  G01P15/08 ,  G01C19/5712 ,  G01P1/00 ,  H03F2203/45546 ,  H03F2203/45151

摘要： A motion sensor with sigma-delta analog-to-digital converter (ADC) having improved bias instability is presented herein. Differential outputs of a differential amplifier of the sigma-delta ADC are electrically coupled, via respective capacitances, to differential inputs of the differential amplifier. To minimize bias instability corresponding to flicker noise that has been injected into the differential inputs, the differential inputs are electrically coupled, via respective pairs of electronic switches, to feedback resistances based on a pair of switch control signals. In this regard, a first feedback resistance of the feedback resistances is electrically coupled to a first defined voltage, and a second feedback resistance of the feedback resistances is electrically coupled to a second defined reference voltage. The differential outputs are electrically coupled to differential inputs of a differential comparator of the sigma-delta ADC, and complementary outputs of the differential comparator comprise the pair of switch control signals.

公开(公告)号：US11726105B2

公开(公告)日：2023-08-15

申请号：US16900185

申请日：2020-06-12

申请人： QUALCOMM Technologies, Inc.

发明人： Robert J. Littrell

IPC分类号： G01P15/09 ,  G01P1/00 ,  H10N30/30 ,  H04R19/04 ,  H04R17/00

CPC分类号： G01P15/09 ,  G01P1/00 ,  H04R17/00 ,  H04R19/04 ,  H10N30/302 ,  H10N30/306 ,  H04R2201/003

摘要： A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

公开(公告)号：US11714098B2

公开(公告)日：2023-08-01

申请号：US16391192

申请日：2019-04-22

申请人： Rosemount Aerospace Inc.

发明人： Jaime Sly ,  Daniel W. Shannon ,  Brian Daniel Matheis ,  Todd Anthony Ell ,  William Kunik ,  Sudarshan N. Koushik

IPC分类号： G01P3/14 ,  E05F15/40 ,  H04W4/38 ,  B64D43/02 ,  G01P1/00

CPC分类号： G01P3/14 ,  B64D43/02 ,  E05F15/40 ,  H04W4/38 ,  G01P1/06

摘要： An ultrasonic air data system can include a pole having a length longer than a boundary layer thickness of a boundary layer flow such that at least a distal end of the pole is configured to extend outwardly from an aircraft surface to be at least partially outside of the boundary layer flow. The system can include a transmitter disposed on or in the pole at or near the distal end of the pole such that the transmitter is located at least partially outside of the boundary layer flow when in use, wherein the transmitter is configured to output a transmitter signal. The system can include one or more receivers disposed downstream of the pole as defined by the boundary layer flow and configured to receive the transmitter signal.

公开(公告)号：US20230236217A1

公开(公告)日：2023-07-27

申请号：US17585367

申请日：2022-01-26

申请人： Robert Bosch GmbH

发明人： Othmane Bennis

IPC分类号： G01P13/00 ,  G01P15/00 ,  G01P1/00 ,  G08B29/04 ,  G08B29/24

CPC分类号： G01P13/00 ,  G01P15/00 ,  G01P1/06 ,  G08B29/046 ,  G08B29/24

摘要： A system for tamper detection of a motion detector. The system includes an electronic controller configured to receive orientation data from an accelerometer of the motion detector. The electronic controller is also configured to filter the orientation data of the accelerometer of the motion detector. The electronic controller is further configured to determine an orientation of the motion detector using the filtered orientation data. The electronic controller is also configured to identify a tamper condition of the motion detector based on the orientation of the motion detector. The electronic controller is further configured to activate an alarm device of the motion detector based on the tamper condition.