Calibration method and calibration system for machine tools

    公开(公告)号:US12228906B2

    公开(公告)日:2025-02-18

    申请号:US17719133

    申请日:2022-04-12

    Abstract: A calibration method for machine tools comprises: providing a workpiece on a machine tool; rotating the workpiece around a first rotation axis parallel to a main shaft of the machine tool and processing the workpiece by a first machining mode; measuring a first dimensional error of a shape of the workpiece along directions of first and second linear axes perpendicular to the first rotation axis; calculating a positional error of the first rotation axis according to the first dimensional error; rotating the workpiece around a second rotation axis perpendicular to the main shaft and processing the workpiece by a different second machining mode; measuring a second dimensional error of the shape of the workpiece along a direction of a third linear axis perpendicular to the second rotation axis; calculating a positional error of the second rotation axis according to the second dimensional error.

    Measurement system and program
    4.
    发明授权

    公开(公告)号:US12198419B2

    公开(公告)日:2025-01-14

    申请号:US17522132

    申请日:2021-11-09

    Abstract: A measurement system includes: measurement target information database that stores measurement point information, including measurement conditions and guidance information for each measurement point, associated with the type of the measurement target; a measuring instrument that performs measurements on the measurement target; an image capturing unit that captures an image of a subject; a display unit; a measurement target identification unit that identifies the type of the measurement target based on the image captured by the image capturing unit; a measurement target information obtaining unit for obtaining the measurement point information corresponding to the type of the measurement target identified by the measurement target identification unit from the measurement target information database; and a setting unit that displays the guidance information included in the measurement point information obtained by the measurement target information obtaining unit on the display unit and sets the measurement conditions on the measuring instrument.

    TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRATE SUPPORT FOR MULTI-PATTERNING PROCESSES

    公开(公告)号:US20240392443A1

    公开(公告)日:2024-11-28

    申请号:US18788998

    申请日:2024-07-30

    Abstract: A substrate processing system is provided and includes a substrate support, a memory, and calibration, operating parameter, and solving modules. The substrate support supports a substrate and includes temperature control elements. The memory stores, for the temperature control elements, temperature calibration values and sensitivity calibration values. The calibration module, during calibration of the temperature control elements, performs a first calibration process to determine the temperature calibration values or a second calibration process to determine the sensitivity calibration values. The sensitivity calibration values relate at least one of trim amounts or deposition amounts to temperature changes. The operating parameter module determines operating parameters for the temperature control elements based on the temperature and sensitivity calibration values. The solving module, subsequent to the calibration of the temperature control elements, controls operation of the temperature control elements during at least one of a trim or deposition step based on the operating parameters.

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