公开(公告)号：US11598890B2

公开(公告)日：2023-03-07

申请号：US16946344

申请日：2020-06-17

申请人： Battelle Energy Alliance, LLC

发明人： Chase N. Taylor

IPC分类号： G01T1/29 ,  H01J37/252 ,  H01J37/317 ,  H01J37/24

摘要： An ion beam profiling system include a beam profiling element, an ion sensitive element electrically isolated from the beam profiling element, an ion source configured to emit an ion beam at the beam profiling element and the ion sensitive element, and a current measuring device coupled to the ion sensitive element. The beam profiling element includes a plate of material having two parallel major surfaces, a first slit aperture extending through the plate of material and having a first longitudinal length extending in a direction parallel to the two parallel major surfaces, and a second slit aperture extending through the plate of material and having a second longitudinal length extending in a direction parallel to the two parallel major surfaces, wherein the first longitudinal length of the first slit aperture is perpendicular to the second longitudinal length of the second slit aperture.

公开(公告)号：US20210396894A1

公开(公告)日：2021-12-23

申请号：US16946344

申请日：2020-06-17

申请人： Battelle Energy Alliance, LLC

发明人： Chase N. Taylor

IPC分类号： G01T1/29 ,  H01J37/317 ,  H01J37/252

摘要： An ion beam profiling system include a beam profiling element, an ion sensitive element electrically isolated from the beam profiling element, an ion source configured to emit an ion beam at the beam profiling element and the ion sensitive element, and a current measuring device coupled to the ion sensitive element. The beam profiling element includes a plate of material have two parallel major surfaces, a first slit aperture extending through the plate of material and having a first longitudinal length extending in a direction parallel to the two parallel major surfaces, and a second slit aperture extending through the plate of material and having a second longitudinal length extending in a direction parallel to the two parallel major surfaces, wherein the first longitudinal length of the first slit aperture is perpendicular to the second longitudinal length of the second slit aperture.

公开(公告)号：US20200088660A1

公开(公告)日：2020-03-19

申请号：US16471199

申请日：2017-12-22

申请人： ORION ENGINEERING LIMITED

发明人： Vladimir VISHNYAKOV ,  Paul Nicholas GATER

IPC分类号： G01N23/2252 ,  H01J37/073 ,  H01J37/252 ,  H01J37/18

摘要： The present invention relates to a handheld material analyser comprising an air-tight chamber having an analysis aperture; an electron beam generation system adapted to direct a beam of electrons through the analysis aperture; an Energy-Dispersive X-ray (EDX) spectroscopy system having a detector located in the chamber; the chamber being adapted to operate at internal pressures between atmospheric pressure and a vacuum of the order of 1 Pa; and a gas inlet adapted to receive an inert gas for generating a plasma in the region of the photocathode. In this way, the plasma can clean the photocathode.

公开(公告)号：US20150308967A1

公开(公告)日：2015-10-29

申请号：US14651187

申请日：2013-12-12

申请人： CANON KABUSHIKI KAISHA

发明人： Kentaro Nagai

IPC分类号： G01N23/04 ,  G01N23/20 ,  H01J37/252

CPC分类号： G01N23/04 ,  G01N23/20 ,  G21K1/06 ,  H01J37/252 ,  H01J2237/221

摘要： The present invention relates to an object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object. The apparatus includes a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern, a second obtaining unit configured to obtain information about contrast in each region of the interference pattern, a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image, and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.

摘要翻译： 本发明涉及一种使用关于由剪切干涉仪产生的干涉图案的信息获取关于对象的相位图像的信息的对象信息获取装置，所述干涉图案由通过或反射的电磁波或电子束形成 目的。 该装置包括：第一获取单元，被配置为使用关于干扰图案的信息来获得关于对象的差分相位图像的信息;第二获取单元，被配置为获得关于干涉图案的每个区域中的对比度的信息;第三获取单元， 使用关于对比度的信息来加权关于差分相位图像的信息，以获得关于加权差分相位图像的信息;以及第四获取单元，被配置为将关于加权微分相位图像的信息进行积分，以获得关于加权微分相位图像的相关图像的信息 物体。

公开(公告)号：US09053902B2

公开(公告)日：2015-06-09

申请号：US14356191

申请日：2012-11-12

申请人： Hitachi High-Technologies Corporation ,  TOTO LTD.

发明人： Yuta Ebine ,  Shinichi Tomita ,  Sukehiro Ito ,  Toshihiro Aoshima

IPC分类号： H01J37/26 ,  G21K5/00 ,  H01J37/252 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/023 ,  H01J37/252 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24415 ,  H01J2237/24475

摘要： In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15).

摘要翻译： 为了提供一种能够在执行X射线元素分析之前的阶段中对经过X射线分析的样本中的分析位置进行评估和区分的带电粒子辐射装置，并且使分析人员能够 本发明提供了一种具有X射线检测器的带电粒子辐射装置，其中第一背散射电子检测器（15）在同一轴线上 X射线检测器（12（25-30））的X射线检测面与X射线检测器（12）一体地或独立地设置，X射线检测器（X射线检测器 12）与第一后向散射电子检测器（15）的背散射电子信号的检测同时或分开。

公开(公告)号：US09035236B2

公开(公告)日：2015-05-19

申请号：US14124504

申请日：2012-06-07

申请人： Vinicius Anghel ,  Guy Jonkmans ,  Cybele Jewett ,  Martin Thompson

发明人： Vinicius Anghel ,  Guy Jonkmans ,  Cybele Jewett ,  Martin Thompson

IPC分类号： G01T1/00 ,  G01T1/29 ,  G01N23/083 ,  H01J3/14 ,  G01V5/00 ,  G01N23/04 ,  G01N23/20 ,  H01J37/252

CPC分类号： G01V5/0025 ,  G01N23/046 ,  G01N23/20 ,  G01N2223/419 ,  G01N2223/626 ,  G01V5/005 ,  G01V5/0066 ,  G01V5/0091 ,  H01J37/252

摘要： A method is proposed herein to detect high atomic number materials, such as Special Nuclear Materials, within a container based on muon tomography. The container is modeled as a plurality of volume elements. Information related to an initial trajectory and a final trajectory of each muon passing through the container is received. Additionally, a set of initial outer prong vectors and a set of final outer prong vectors are created. Then, a plurality of vector combinations are created from a selected initial vector and a selected final vector. A metric is determined and associated with each vector combination. A subset of the plurality of vector combinations is associated with each volume element and an estimated scattering density is determined and assigned to the volume element. Based on the estimated scattering density assigned to the volume elements, a three dimensional image of the container may be generated.

摘要翻译： 本文提出了一种在基于μ子层析成像的容器内检测高原子序列材料（如特殊核材料）的方法。 容器被建模为多个体积元件。 接收与通过容器的每个μ子的初始轨迹和最终轨迹相关的信息。 另外，创建一组初始的外侧叉子向量和一组最终的外部叉形矢量。 然后，从所选择的初始向量和所选择的最终向量创建多个向量组合。 确定度量并与每个向量组合相关联。 多个向量组合的子集与每个体积元素相关联，并且确定估计的散射密度并将其分配给体积元素。 基于分配给体积元素的估计散射密度，可以产生容器的三维图像。

公开(公告)号：US20140117229A1

公开(公告)日：2014-05-01

申请号：US13661830

申请日：2012-10-26

申请人： FEI COMPANY

发明人： Michael James Owen

IPC分类号： H01J37/252

CPC分类号： H01J37/252 ,  G01N23/2252 ,  H01J2237/221 ,  H01J2237/24585 ,  H01J2237/2561

摘要： Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown mineral sample, the acquired spectrum of the sample is sequentially decomposed into the standard spectra of the elements from the element list of each of the mineral definitions, and a similarity metric computed for each mineral definition. The unknown mineral is identified as the mineral having the best similarity metric.

摘要翻译： 矿物定义各自包括元素列表，每个元素具有相应的标准光谱。 为了确定未知矿物样品的组成，将样品的获取光谱从每个矿物定义的元素列表顺序分解成元素的标准光谱，以及为每种矿物定义计算的相似性度量。 未知矿物被鉴定为具有最佳相似性度量的矿物。

公开(公告)号：US08097846B1

公开(公告)日：2012-01-17

申请号：US12392887

申请日：2009-02-25

申请人： Alexandre Anguelouch ,  Lei Wang ,  Chester Xiaowen Chien

发明人： Alexandre Anguelouch ,  Lei Wang ,  Chester Xiaowen Chien

IPC分类号： G01N23/00 ,  H01J37/252 ,  H01J37/30

CPC分类号： G11B5/3166 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3173 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/3174 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for measuring three-dimensional devices in a wafer comprises the step of obtaining a plurality of cross-sectional images of a corresponding plurality of three-dimensional devices in the wafer. The plurality of three-dimensional devices have essentially identical geometries. Each cross-sectional image is obtained from a plane in the corresponding three-dimensional device at a predetermined distance from a fiducial mark thereof. The predetermined distance is different for each of the plurality of cross-sectional images. The method further comprises the step of determining the geometries of the plurality of three-dimensional devices based on the cross-sectional images thereof.

摘要翻译： 用于测量晶片中的三维器件的方法包括获得晶片中相应的多个三维器件的多个横截面图像的步骤。 多个三维装置具有基本相同的几何形状。 每个横截面图像从相对应的三维装置的与其基准标记预定距离处的平面获得。 对于多个横截面图像中的每一个，预定距离是不同的。 该方法还包括基于其横截面图像来确定多个三维装置的几何形状的步骤。

公开(公告)号：US07541580B2

公开(公告)日：2009-06-02

申请号：US11731743

申请日：2007-03-30

申请人： William Ralph Knowles ,  Milos Toth

发明人： William Ralph Knowles ,  Milos Toth

IPC分类号： H01J37/252

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2449 ,  H01J2237/2608

摘要： A detector for use with a high pressure SEM, such as an ESEM® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal amplification without increasing working distance or pressure. Embodiments can therefore provide improved resolution and can operate at lower gas pressures.

摘要翻译： 用于高压SEM的检测器，如来自FEI公司的ESEM环境SEM，扩展了PLA上方的有效检测空间，从而在不增加工作距离或压力的情况下增加了二次信号放大。 因此，实施例可以提供改进的分辨率并且可以在较低的气体压力下操作。

公开(公告)号：US07186976B2

公开(公告)日：2007-03-06

申请号：US10475288

申请日：2002-04-19

申请人： Michael Frank Dean ,  Giles Adam Edward Martin

发明人： Michael Frank Dean ,  Giles Adam Edward Martin

IPC分类号： H01J37/28 ,  H01J37/252

CPC分类号： H01J37/301 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2605

摘要： There is provided a reconfigurable scanning electron microscope (RSEM) (100) comprising: (a) a gun assembly (110) and an associated electron optical column (120) for generating an electron beam (600), for demagnifying the electron beam (600) to generate an electron probe (C3) and for scanning the probe (C3) across a sample (190); (b) an electron detector (550) for detecting emissions from the sample (190) in response to scanned electron probe irradiation thereof and for generating a corresponding detected signal (Sd) indicative of the magnitude of the emissions; and (c) a display (170) for receiving the detected signal (Sd) and scanning signals (x, y) indicative of the position of the probe (C3) relative to the sample (190) for generating the image of the sample (190). The RSEM (100) is distinguished in that it further includes aperture bearing members (500, 520), each member (500, 520) including an associated electon-beam transmissive aperture, for at least partially gaseously isolating the gun assembly (110) and the electron optical column (110) from the sample (190), thereby enabling the RSEM (100) to be reconfigurable as a high-vacuum scanning electron microscope and also as an environmental scanning electron microscope, the RSEM (100) being reconfigurable to include no aperture members, one aperture member (500, 750) and a plurality of aperture members (500, 750; 520 850, 860).

摘要翻译： 提供了一种可重构扫描电子显微镜（RSEM）（100），包括：（a）用于产生电子束（600）的枪组件（110）和相关联的电子光学柱（120），用于使电子束 ）以产生电子探针（C 3 N 3）并用于跨越样品（190）扫描探针（C 3 N 3）。 （b）电子检测器（550），用于响应于其扫描的电子探针照射来检测来自样品（190）的发射，并且用于产生相应的检测信号（S SUB） 排放; 以及（c）用于接收检测信号（S SUB）的显示器（170）和表示探头位置的扫描信号（x，y） ）相对于用于产生样品（190）的图像的样品（190）。 RSEM（100）的特征在于它还包括孔口支承构件（500,520），每个构件（500,520）包括相关联的电子束透射孔，用于至少部分地气动隔离枪组件（110）和 来自样品（190）的电子光学柱（110），从而使得RSEM（100）能够被重构为高真空扫描电子显微镜，并且还可以作为环境扫描电子显微镜，RSEM（100）可重新配置为包括 无孔构件，一个孔构件（500,750）和多个孔构件（500,750; 520 850,860）。