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公开(公告)号：US11715628B2
公开(公告)日：2023-08-01
申请号：US17184962
申请日：2021-02-25
发明人： Jeongil Mun , Kyeonghun Kim , Taekyoon Park , Jongwoo Sun , Seeyub Yang , Yongseok Lee , Hyungjoo Lee , Eunhee Jeang
CPC分类号： H01J37/32467 , H01J9/245 , H01J37/32119 , H01J37/32238 , H01J37/32972 , H01J2237/103
摘要： A method of forming a plasma processing apparatus comprises providing a chamber, the chamber including a wall defining an interior, and a viewport extending through the wall. An analysis apparatus connected to the viewport may be formed. The analysis apparatus includes an analyzer adjacent to the chamber, a probe connected to the analyzer and aligned with the viewport, and a first window aligned with the probe, the first window having a first surface, and a second surface at an opposite side relative to the first surface, the second surface being exposed to the interior of the chamber, and the second surface of the first window has a scattering surface.
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公开(公告)号：US20220406553A1
公开(公告)日：2022-12-22
申请号：US17837889
申请日：2022-06-10
申请人： KLA Corporation
发明人： Mark S. Wang , Joshua Wittenberg
摘要： A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.
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公开(公告)号：US20210249216A1
公开(公告)日：2021-08-12
申请号：US16786303
申请日：2020-02-10
发明人： Min He , Norman Wandke , Thomas Muchowicz
摘要： Embodiments of the invention provide a conductive coating on an insulator of an x-ray tube and a method for applying the conductive coating. The method may use a first process, such as brazing, to join a support to the insulator and a second process, such as vapor deposition, to apply the conductive coating onto a substrate surface of the insulator. The second process may be carried out after the first process without any damage to x-ray tube insulator assembly.
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公开(公告)号：US20210035767A1
公开(公告)日：2021-02-04
申请号：US16525465
申请日：2019-07-29
发明人： Gang Grant PENG , Wai-Fan YAU , David W. GROECHEL , Frank F. HOOSHDARAN , Tom K. CHO , Yao-Hung YANG
IPC分类号： H01J9/24 , B23K26/082 , B23K26/12 , B23K26/352
摘要： Embodiments of the present disclosure generally relate to a method for forming and treating a component in semiconductor manufacturing. In one embodiment, a method for treating a chamber component used in vacuum processing includes obtaining the chamber component including a recess formed in a surface of the chamber component, the surface being fabricated from a metal, and the recess has a depth ranging from about 0.5 mm to about 10 mm and a width ranging from about 1 mm to about 15 mm. The method further includes polishing the bottom surface of the recess using a laser to form a polished bottom surface having an Ra number of 1 micron or less. The laser can achieve high quality surface finishing.
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公开(公告)号：US20200090922A1
公开(公告)日：2020-03-19
申请号：US16692715
申请日：2019-11-22
发明人： John R. Goscha , Walter Peter Lapatovich , David Alan Goodman , David Wentzel , Felix I. Alexandrov
IPC分类号： H01J65/04 , H05B41/28 , H01J9/24 , H05B41/392 , H01J61/28 , H01J9/40 , H01J9/395 , H01J7/22 , H01J7/20 , H01J9/34 , H01J9/32
摘要： A dimmable induction RF fluorescent lamp comprising a dimming circuit enabling the induction RF fluorescent lamp to dim in response to a signal from an external dimming circuit, and having a main mercury amalgam having a vapor pressure at room temperature which is higher than the vapor pressure of the mercury amalgam formed on the flag.
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公开(公告)号：US10453669B2
公开(公告)日：2019-10-22
申请号：US15706452
申请日：2017-09-15
摘要： In some embodiments, an electrodeless lamp may be provided. The lamp may include an outer tube and an inner tube. The inner tube may be sealed to the outer tube to define a sealed space in which a gas may be contained. The gas may be configured to emit electromagnetic radiation when an electromagnetic field is applied thereto.
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公开(公告)号：US10403499B2
公开(公告)日：2019-09-03
申请号：US15848086
申请日：2017-12-20
发明人： Emil Aslanov , Jekil Ryu , Haesook Lee , Gyoowan Han
IPC分类号： H01L21/02 , H01L21/268 , H01L29/66 , H01L29/786 , B23K26/06 , H01L27/12 , H01S5/00 , H01J29/46 , H01J9/24 , H01S5/40 , B23K26/067 , B23K103/00
摘要： A laser polycrystallization apparatus including: a light source for emitting a laser beam; a diffraction grating for receiving the laser beam from the light source, changing a path and a magnitude of the received laser beam, and outputting the changed laser beam; a light split portion for splitting the laser beam received from the diffraction grating; and a light superposition portion for superposing the split laser beams received from the light split portion and irradiating the superposed split laser beams to a substrate. An angle between the laser beam irradiated to an incidence surface of the diffraction grating from the light source and a line substantially perpendicular to an emission surface of the diffraction grating is an acute angle.
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公开(公告)号：US10211042B2
公开(公告)日：2019-02-19
申请号：US15888066
申请日：2018-02-04
申请人： Robert Su
发明人： Robert Su
IPC分类号： H01J61/62 , H01J61/82 , A01G9/20 , H01J9/24 , H01J9/39 , H01J9/32 , H01J61/36 , H01J61/34 , H01J61/26
摘要： A double-ended high intensity discharge lamp includes a luminous tube and reflective layer covering at a reflective portion provided on at least a portion of aid luminous tube for reflecting light emitted from an illuminator supported in the luminous tube towards the reflective portion to project towards another opposing side of the luminous tube.
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公开(公告)号：US10056220B2
公开(公告)日：2018-08-21
申请号：US15715759
申请日：2017-09-26
CPC分类号： H01J9/326 , H01J9/247 , H01J61/368 , H01J61/86
摘要： A method of manufacturing a high-pressure discharge lamp, comprising the steps of: inserting a mount into an interior of a glass tube having an outer diameter smaller than an inner diameter of an end part of a sealed container; radially constricting the glass tube at a first position located away from a metallic foil toward a tip of an electrode; sealing the mount by a region of the glass tube that ranges from the first position to at least the other end of the metallic foil; protruding the electrode out of the glass tube located away from the first position toward the tip of the electrode to form a glass-tube air-tightly sealed mount; inserting the sealed mount into the end part of the sealed container; and radially constricting the end part of the sealed container to sealing the glass tube of the sealed mount by the end part.
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公开(公告)号：US09885897B2
公开(公告)日：2018-02-06
申请号：US14890457
申请日：2015-10-22
发明人： Quan Li
IPC分类号： G02F1/1333 , H01J9/24
CPC分类号： G02F1/133308 , G02F2001/13332 , H01J9/24
摘要： A method of forming a front frame of an LCD includes: providing a rectangle frame; disposing bending lines on the side frames of the rectangle frame; adhering a layer of buffering material to the part of the side frame that is on the inner side of the bending line, where the part of the side frame that is on the inner side of the bending line refers to the part of the side frame that is between the bending line and the inner edge of the side frame; and stamping and bending the rectangle frame along the bending line. The present invention can align the layer of buffering material with the inner edge of the side frame so that the layer of buffering material does not extend to the open area of the front frame, therefore does not affect the display of the liquid crystal panel.
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