Variable width for RF neighboring stacks

    公开(公告)号:US12237327B2

    公开(公告)日:2025-02-25

    申请号:US17523816

    申请日:2021-11-10

    Abstract: Devices and methods to manufacture a stack of FET switches in presence of a neighboring stack of FET switches are described. The stack of FET switches is designed or manufactured so that at least its top FET has a width that is smaller than the width of its bottom FET. Other voltage handling configurations and distributions of widths are described.

    NITRIDE-BASED SEMICONDUCTOR IC CHIP AND METHOD FOR MANUFACTURING THE SAME

    公开(公告)号:US20240047451A1

    公开(公告)日:2024-02-08

    申请号:US17626117

    申请日:2021-08-06

    Inventor: Hui YAN Sichao LI

    Abstract: A nitride-based semiconductor integrated circuit (IC) chip is provided. The IC chip comprises: a substrate; intra-transistor isolation regions formed in a surface of the substrate for defining power domains respectively for transistors integrated in the IC chip; an epitaxial body layer disposed over the substrate and the intra-transistor isolation regions; a first and a second nitride-based layers disposed above the epitaxial body layer. The epitaxial body layer and the substrate are formed of a same material and each of the one or more intra-transistor isolation regions is implanted to have a doping polarity opposite to a doping polarity of the substrate. By the implementation of the epitaxial body layer over the isolation regions, the quality of the heterojunction formed between the nitride-based semiconductor layers can be guaranteed as the impact of implantation of the isolation regions to the formation of heterojunction interface can be eliminated.

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