NITRIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20250072034A1

    公开(公告)日:2025-02-27

    申请号:US18798916

    申请日:2024-08-09

    Applicant: ROHM CO., LTD.

    Inventor: Yosuke HATA

    Abstract: The present disclosure provides a nitride semiconductor device. The nitride semiconductor device includes: an electron travelling layer; an electron supply layer; a gate layer, formed on the electron supply layer; a gate electrode, formed on the gate layer; and a passivation layer, having a source opening and a drain opening. The electron travelling layer includes: a first portion, located under the gate layer; and a second portion, located between the gate layer and the source opening, and located between the gate layer and the drain opening. The electron supply layer includes: a first electron supply layer, formed on the first portion and located below the gate layer; and a second electron supply layer, formed on the second portion and connected to the first electron supply layer.

    SEMICONDUCTOR POWER DEVICE
    2.
    发明申请

    公开(公告)号:US20250072032A1

    公开(公告)日:2025-02-27

    申请号:US18484430

    申请日:2023-10-10

    Abstract: A semiconductor power device includes a substrate, a channel layer, a barrier layer, a gate, a source, and a drain. The channel layer is located on the substrate. The barrier layer is located on the channel layer and includes a first region and a second region outside the first region. There is a first compound in the first region and a second compound in the second region. The first compound and the second compound each have an aluminum atom of a different ratio, and the aluminum composition ratio of the first compound is less than the aluminum composition ratio of the second compound. The ratio consists of a plurality of different atoms in the first compound and the second compound.

    P TYPE GALLIUM NITRIDE CONFORMAL EPITAXIAL STRUCTURE OVER THICK BUFFER LAYER

    公开(公告)号:US20250063756A1

    公开(公告)日:2025-02-20

    申请号:US18938715

    申请日:2024-11-06

    Abstract: A semiconductor device includes a GaN FET on a silicon substrate and a buffer layer of III-N semiconductor material, with a columnar region, a transition region surrounding the columnar region, and an inter-columnar region around the transition region. The columnar region is higher than the inter-columnar region. The GaN FET includes a gate of III-N semiconductor material with a thickness greater than twice the vertical range of the top surface of the buffer layer in the columnar region. A difference between the gate thickness over the columnar region and over the transition region is less than half of the vertical range of the top surface of the buffer layer in the columnar surface. The semiconductor device may be formed by forming a gate layer of III-N semiconductor material over the barrier layer by a gate MOVPE process using a carrier gas that includes zero to 40 percent hydrogen gas.

    Semiconductor device and method for fabricating a semiconductor wafer

    公开(公告)号:US12230689B2

    公开(公告)日:2025-02-18

    申请号:US17145507

    申请日:2021-01-11

    Abstract: In an embodiment, a method for fabricating a semiconductor wafer includes: epitaxially growing a III-V semiconductor on a first surface of a foreign wafer having a thickness tw, the first surface being capable of supporting the epitaxial growth of at least one III-V semiconductor layer, the wafer having a second surface opposing the first surface; removing portions of the III-V semiconductor to produce a plurality of mesas including the III-V semiconductor arranged on the first surface of the wafer; applying an insulation layer to regions of the wafer arranged between the mesas; and progressively removing portions of the second surface of the wafer, exposing the insulation layer in regions adjacent the mesas and producing a worked second surface.

    HEMT with stair-like compound layer at drain

    公开(公告)号:US12224333B2

    公开(公告)日:2025-02-11

    申请号:US17842814

    申请日:2022-06-17

    Inventor: Po-Yu Yang

    Abstract: An HEMT with a stair-like compound layer as a drain includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer. The composition of the first III-V compound layer and the second III-V compound layer are different from each other. A source electrode, a gate electrode and a drain electrode are disposed on the second III-V compound layer. The gate electrode is disposed between the source electrode and the drain electrode. A first P-type III-V compound layer is disposed between the drain electrode and the second III-V compound layer. The first P-type III-V compound layer is stair-like.

Patent Agency Ranking