Method and device for driving a piezoelectric device

    公开(公告)号:US12052925B2

    公开(公告)日:2024-07-30

    申请号:US17033781

    申请日:2020-09-26

    IPC分类号: H01L41/02 B05B17/06 H10N30/80

    CPC分类号: H10N30/802 B05B17/0653

    摘要: There is presented a method for driving a piezoelectric device and an atomizer for atomizing a fluid, and an atomization method for a fluid using a piezoelectric device; the atomizer employs a piezoelectric device and circuitry that uses a switching voltage across the piezoelectric device at an operating frequency; sensing a sensed voltage corresponding to a phase of the piezoelectric device; and responsive to whether the sensed voltage is in phase or out of phase relative to the switching voltage, changing the operating frequency provided to the piezoelectric device, and the changing is one of: increasing the operating frequency by a first value, or decreasing the operating frequency by a second value.

    Pull up electrode and waffle type microstructure
    7.
    发明授权
    Pull up electrode and waffle type microstructure 有权
    拉起电极和华夫饼型微结构

    公开(公告)号:US09018717B2

    公开(公告)日:2015-04-28

    申请号:US13237261

    申请日:2011-09-20

    IPC分类号: H01L41/02 H01H1/00 H01H59/00

    摘要: The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiffness to the microstructure while permitting the support beam to flex. The waffle-type microstructure permits design of rigid structures in combination with flexible supports. Additionally, compound springs may be used to create very stiff springs to improve hot-switch performance of MEMS devices. To permit the MEMS devices to utilize higher RF voltages, a pull up electrode may be positioned above the cantilever to help pull the cantilever away from the contact electrode.

    摘要翻译: 本发明一般涉及MEMS器件及其制造方法。 MEMS器件的悬臂可以具有华夫饼型微结构。 华夫饼形微结构利用支撑梁来赋予微结构刚度,同时允许支撑梁弯曲。 华夫饼型微结构允许将刚性结构与柔性支撑结合在一起。 此外,可以使用复合弹簧来产生非常硬的弹簧以改善MEMS装置的热开关性能。 为了允许MEMS器件利用更高的RF电压,可以将上拉电极定位在悬臂上方以帮助将悬臂从接触电极拉出。

    RESONATOR ELEMENT HAVING A NOTCHED BASE
    9.
    发明申请
    RESONATOR ELEMENT HAVING A NOTCHED BASE 审中-公开
    谐振器元件有一个凹陷的基座

    公开(公告)号:US20140055206A1

    公开(公告)日:2014-02-27

    申请号:US14068126

    申请日:2013-10-31

    IPC分类号: H01L41/02 H03B28/00

    摘要: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

    摘要翻译: 提供了能够改善耐冲击性的谐振元件。 石英晶体振子元件是通过蚀刻相对于石英晶体的晶轴以预定角度切割的Z板形成的谐振器元件。 石英晶体振子元件包括基座,从基座沿Y轴方向延伸的一对谐振臂,以及在X轴方向上开槽基部形成的正X轴槽口和负X轴槽口 。 正X轴槽口通过从X轴的负侧朝向正侧切开基座而形成,使得正X轴槽口的宽度随着接近外圆周而增加。