公开(公告)号：WO2007024225A1

公开(公告)日：2007-03-01

申请号：PCT/US2005/030337

申请日：2005-08-26

Applicant: XINETICS, INC. ,  EALEY. Mark, A.

Inventor： EALEY. Mark, A.

IPC: G01D7/00

CPC classification number: G01P15/09 ,  G01L5/167 ,  G01P15/18 ,  H01L41/0825 ,  H01L41/083 ,  H01L41/0833 ,  H01L41/092 ,  H01L41/1132

Abstract: An improved multi-axis transducer includes a stack of ferroelectric layers (20) and a plurality of common electrodes (24) and addressing electrodes (22) alternately disposed between the ferroelectric layers; each of the addressing electrodes including a number of sections electrically isolated from each other and forming a set with corresponding sections in other addressing electrodes (22), a common conductor (18) is electrically connected to the common electrodes (24) and a number of addressing conductors (12, 14, 16) is, each one, electrically connected to a different set of the sections of the addressing electrodes (22).

Abstract translation: 改进的多轴换能器包括交替地布置在铁电层之间的堆叠铁电层（20）和多个公共电极（24）和寻址电极（22）; 每个寻址电极包括彼此电隔离的多个部分，并且在其它寻址电极（22）中形成具有对应部分的集合，公共导体（18）电连接到公共电极（24），并且多个 寻址导体（12,14,16）每个电连接到寻址电极（22）的不同组的一部分。