公开(公告)号：WO2015149172A1

公开(公告)日：2015-10-08

申请号：PCT/CA2015/050253

申请日：2015-03-31

Applicant: UNIVERSITY OF MANITOBA

Inventor： RASHIDIAN, Atabak ,  SHAFAI, Lotfollah

IPC: G03F7/00 ,  G03F7/26 ,  H01Q1/38 ,  H01Q9/04

CPC classification number: H01Q9/04 ,  G03F7/325 ,  G03F7/38 ,  H01Q1/38

Abstract: A method of passive microwave component construction is disclosed. A metal conductor is sputtered on a silicon wafer to form a ground plane. A photoresist dielectric film is applied on top of the metal conductor. Photolithography is performed to construct a substrate structure using the photoresist. A metal conductor is sputtered through mask onto the substrate structure to form a top conductor. A development process is performed to remove unexposed photoresist leaving exposed photoresist between the top conduct and ground plane. A passive microwave component is also disclosed having a metal conductor on a silicon wafer providing a ground plane. A substrate deposited on the metal conductor formed during photolithography using a photoresist; and a top metal conduct on the narrow film substrate.

Abstract translation: 公开了一种无源微波部件结构的方法。 将金属导体溅射在硅晶片上以形成接地平面。 将光致抗蚀剂电介质膜施加在金属导体的顶部。 进行光刻以构造使用光致抗蚀剂的衬底结构。 将金属导体通过掩模溅射到衬底结构上以形成顶部导体。 进行显影处理以除去未曝光的光致抗蚀剂，留下在顶部导电和接地平面之间的暴露的光致抗蚀剂。 还公开了一种无源微波组件，其在硅晶片上具有提供接地平面的金属导体。 沉积在使用光致抗蚀剂的光刻期间形成的金属导体上的衬底; 和在薄膜基片上的顶部金属导电。

公开(公告)号：WO2013190392A2

公开(公告)日：2013-12-27

申请号：PCT/IB2013/001973

申请日：2013-06-21

Applicant: UNIVERSITY OF MANITOBA

Inventor： RASHIDIAN, Atabak ,  SHAFAI, Lotfollah ,  KLYMYSHYN, David, M. ,  ALIGODARZ, Mohammadreza, Tayfeh

IPC: H01P1/00

CPC classification number: H01P3/081 ,  H01P1/20 ,  H01P1/2002 ,  H01P3/16 ,  H01P5/087 ,  H01P5/184 ,  H01P5/188 ,  H01P11/006 ,  H01Q9/0485

Abstract: A new class of antennas and microwave components are introduced. In this approach a high-permittivity dielectric film is applied (i.e. printed) on a dielectric substrate, which may be grounded. By changing the shape of the high-permittivity film, different microwave devices {e.g. waveguides, filters, couplers, and antennas) are produced. By changing the size and permittivity of the high-permittivity film and dielectric substrate, these elements are designed at different frequencies for different applications. Highly-efficient microwave devices can result due to the absence of surface currents.

Abstract translation: 引入了一类新型的天线和微波元件。 在这种方法中，将高介电常数介质膜施加（即印刷）在可以接地的电介质基板上。 通过改变高介电常数膜的形状，不同的微波装置（例如， 波导，滤波器，耦合器和天线）。 通过改变高介电常数薄膜和电介质基片的尺寸和介电常数，这些元件在不同的应用中被设计在不同的频率上。 由于没有表面电流，可以产生高效的微波器件。