公开(公告)号：WO2006061785A3

公开(公告)日：2006-06-15

申请号：PCT/IB2005/054103

申请日：2005-12-07

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  U.S. PHILIPS CORPORATION ,  INNOVENT e, V. Technologieentwicklung ,  AMMERLAAN, Johannes, A., M. ,  MAESSEN, Ralph, T., H. ,  WEIDL, Roland

Inventor： AMMERLAAN, Johannes, A., M. ,  MAESSEN, Ralph, T., H. ,  WEIDL, Roland

IPC: C23C16/453

Abstract: Method and apparatus for depositing film on flexible (plastic/metal) foil and/or temperature sensitive substrates (101) by combustion chemical vapor deposition (C- CVD). A substrate (101) is held in place to provide physical and conductive thermal contact between the substrate (101) and a substrate holder (102). The substrate holder (102) is cooled using a cooling fluid and the substrate (101) and burner are moved relative to each other as C-CVD takes place. Heating of the substrate (101) during C- CVD is controlled and deterioration by heating is avoided. The foil or substrate (101) is suitable, in particular, for use in flat and flexible displays.