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    APPLICATORS AND COOLING SYSTEMS FOR A PLASMA DEVICE
    1.
    发明申请
    APPLICATORS AND COOLING SYSTEMS FOR A PLASMA DEVICE 审中-公开
    用于等离子体设备的涂敷器和冷却系统

    公开(公告)号：WO2008042779A3

    公开(公告)日：2008-10-30

    申请号：PCT/US2007079903

    申请日：2007-09-28

    申请人： MKS INSTR INC ,  SCHUSS JACK J ,  CHEN XING

    发明人： SCHUSS JACK J ,  CHEN XING

    IPC分类号： H05H1/24 ,  H01J37/32

    CPC分类号： H01J37/32522 ,  H01J37/32357

    摘要： An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form a leak-tight plasma vessel. A cooling system surrounding the improved plasma vessel includes a rigid cooling plate and a deformable thermal transfer material disposed between the plasma vessel and the cooling plate. After use or at an operator's discretion, the plasma vessel can be removed from the cooling system and a new vessel may be inserted in its place. Alternatively, the used vessel may be refurbished and re-inserted into the cooling system. The new or refurbished vessel may or may not be of the same size or configuration as the used vessel. Thermal contact between the cooling system and the new or refurbished vessel, however is maintained through the deformable thermal transfer material.

    摘要翻译： 提供有效冷却的改进的等离子体容器（即，等离子体施加器）包括具有通过介电连接器流体连接在一起的电介质内部的多个大致线性管。 管和连接器连接在一起形成密封的等离子体容器。 围绕改进的等离子体容器的冷却系统包括刚性冷却板和设置在等离子体容器和冷却板之间的可变形热传递材料。 在使用后或由操作员自行决定后，等离子体容器可以从冷却系统中取出，并且可以在其位置插入新的容器。 或者，使用过的容器可以翻新并重新插入冷却系统。 新的或翻新的船只可能与使用的船只尺寸或配置相同或不同。 然而，冷却系统与新的或翻新的容器之间的热接触通过可变形的热转印材料来保持。

    APPLICATORS AND COOLING SYSTEMS FOR A PLASMA DEVICE
    4.
    发明申请
    APPLICATORS AND COOLING SYSTEMS FOR A PLASMA DEVICE 审中-公开
    一种等离子体装置的应用和冷却系统

    公开(公告)号：WO2008042779A2

    公开(公告)日：2008-04-10

    申请号：PCT/US2007/079903

    申请日：2007-09-28

    申请人： MKS INSTRUMENTS, INC. ,  SCHUSS, Jack, J. ,  CHEN, Xing

    发明人： SCHUSS, Jack, J. ,  CHEN, Xing

    CPC分类号： H01J37/32522 ,  H01J37/32357

    摘要： An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form a leak-tight plasma vessel. A cooling system surrounding the improved plasma vessel includes a rigid cooling plate and a deformable thermal transfer material disposed between the plasma vessel and the cooling plate. After use or at an operator's discretion, the plasma vessel can be removed from the cooling system and a new vessel may be inserted in its place. Alternatively, the used vessel may be refurbished and re-inserted into the cooling system. The new or refurbished vessel may or may not be of the same size or configuration as the used vessel. Thermal contact between the cooling system and the new or refurbished vessel, however is maintained through the deformable thermal transfer material.

    摘要翻译： 提供有效冷却的改进的等离子体容器（即，等离子体施加器）包括多个大致直线的管，其具有通过电介质连接器流体连接在一起的电介质内部。 管和连接器连接在一起以形成不透漏等离子体容器。 围绕改进的等离子体容器的冷却系统包括刚性冷却板和设置在等离子体容器和冷却板之间的可变形的热转印材料。 使用后或由操作人员决定，等离子体容器可从冷却系统中取出，新的容器可插入其中。 或者，所用的容器可以被翻新并重新插入到冷却系统中。 新的或翻新的船舶可能与或不同于使用的船只的尺寸或构造。 然而，冷却系统和新的或翻新的容器之间的热接触通过可变形的热转印材料保持。