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公开(公告)号：WO2017045874A1
公开(公告)日：2017-03-23
申请号：PCT/EP2016/069876
申请日：2016-08-23
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： POLO, Alessandro , MATHIJSSEN, Simon, Gijsbert, Josephus , TINNEMANS, Patricius, Aloysius, Jacobus , COSTON, Scott, Douglas , HAVELIN, Ronan, James
CPC classification number: G03F9/7065 , G02B6/2938
Abstract: A lithographic apparatus includes an alignment sensor configured to determine the position of an alignment target comprising a periodic structure. The alignment sensor includes a demultiplexer (700) to demultiplex a number of intensity channels (one of them shown to be output at fiber 702). The demultiplexer includes a number of stages arranged in series and a number of demultiplexing components (706, 708a,b, 710a-d,712a-h), each demultiplexing component being operable to divide an input radiation beam into two radiation beam portions. The first stage has a first demultiplexing component (706) that is arranged to receive as an input radiation beam an incident radiation beam. Each successive stage is arranged such that it has twice the number of demultiplexing components as a preceding stage, each demultiplexing component of each stage after the first stage receiving as an input one of the radiation beam portions output from a demultiplexing component of the preceding stage.
Abstract translation: 光刻设备包括配置成确定包括周期性结构的对准目标位置的对准传感器。 对准传感器包括解复用器（700），以解复用多个强度通道（其中一个示出为在光纤702处输出）。 解复用器包括串联布置的多个级和多个解复用组件（706,708a，b，710a-d，712a-h），每个解复用组件可操作以将输入辐射束分成两个辐射束部分。 第一级具有布置成作为输入辐射束接收入射辐射束的第一解复用部件（706）。 每个连续级被布置为使得其具有前一级的解复用分量的两倍，在第一级接收之后的每级的每个解复用分量作为从前一级的解复用分量输出的辐射束部分中的输入一个。
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2.发明申请BROAD SPECTRUM RADIATION BY SUPERCONTINUUM GENERATION USING A TAPERED OPTICAL FIBER 审中-公开使用锥形光纤超级连续辐射的宽谱辐射
公开(公告)号：WO2017182204A1
公开(公告)日：2017-10-26
申请号：PCT/EP2017/056338
申请日：2017-03-17
Applicant: ASML HOLDING N.V.
Inventor： LEUNG, King, Pui , CHEN, Tao , HAVELIN, Ronan, James , AARTS, Igor, Matheus, Petronella , JOOBEUR, Adel , CARBONE, Joseph
CPC classification number: G02B6/02004 , G01B11/02 , G01B2210/56 , G02B6/1228 , G02B6/2746 , G02B6/29377 , G02F1/365 , G02F2001/3528 , G03F9/7065
Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
Abstract translation: 一种测量设备，包括：锥形光纤，所述锥形光纤具有用于接收辐射的输入并且具有用于向测量目标提供光谱加宽的输出辐射的输出，所述锥形光纤被配置为 光谱地扩大在输入处接收到的辐射; 以及配置成接收来自测量目标的输出辐射的重定向部分的检测器系统。
