公开(公告)号：WO2015135912A3

公开(公告)日：2015-11-12

申请号：PCT/EP2015054913

申请日：2015-03-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ROELOF ,  BANINE VADIM YEVGENYEVICH ,  BARTRAIJ PETRUS RUTGERUS ,  DONKER RILPHO LUDOVICUS ,  AKKERMANS JOHANNES ANTONIUS GERARDUS

IPC: G03F7/20 ,  H01S3/09 ,  H05H7/00 ,  H05H7/04

CPC classification number: G03F7/70008 ,  G03F7/70025 ,  G03F7/7005 ,  G03F7/70208 ,  G03F7/70808 ,  H01S3/0903 ,  H05H7/04

Abstract: The present invention is concerned with a free electron laser. The free electron laser comprises an electron source operable to emit a beam of electrons, a particle accelerator operable to accelerate the beam of electrons to relativistic energies, an undulator operable to guide the relativistic electron beam along a periodic path so as to stimulate emission of coherent radiation and a steering unit operable to alter the trajectory of the electron beam so as to direct the electron beam from a first path along which the electron beam propagates substantially in a first direction to a second path along which the electron beam propagates substantially in a second direction, wherein the first path and the second path are vertically separated from one another.

Abstract translation: 本发明涉及一种自由电子激光器。 自由电子激光器包括可操作以发射电子束的电子源，可操作以将电子束加速到相对论能量的粒子加速器，可操作以沿着周期性路径引导相对论电子束的波动器，以便刺激相干能量的发射 辐射和转向单元，其可操作以改变电子束的轨迹，以便引导来自第一路径的电子束，电子束沿着第一路径在第一方向上传播到第二路径，电子束沿着第二路径基本上在第二路径中传播 方向，其中第一路径和第二路径彼此垂直分离。

公开(公告)号：WO2016083120A3

公开(公告)日：2016-07-28

申请号：PCT/EP2015076179

申请日：2015-11-10

Applicant: ASML NETHERLANDS BV

Inventor： DEKKERS JEROEN ,  NIENHUYS HAN-KWANG ,  RENKENS MICHAEL JOZEF MATHIJS ,  AKKERMANS JOHANNES ANTONIUS GERARDUS ,  DE VRIES GOSSE CHARLES ,  LOOPSTRA ERIK ROELOF

IPC: G03F7/20 ,  G02B5/18 ,  G02B6/293

CPC classification number: G03F7/70158 ,  G02B5/1828 ,  G02B6/29314 ,  G03F7/70266

Abstract: An adjustable diffraction grating comprises: an optical element and a distortion mechanism. The optical element has an optical surface for receiving an input radiation beam. The optical element is provided with a plurality of closed channels below the optical surface, above each closed channel the optical surface being formed from a membrane of material. The distortion mechanism comprises one or more actuators that are operable to distort the membranes over the closed channels so as to control the shape of the optical surface and to form a periodic structure on the optical surface which acts as a diffraction grating such that the input radiation beam is diffracted from the optical element to form a plurality of angularly separated sub-beams.

Abstract translation: 可调衍射光栅包括：光学元件和失真机构。 光学元件具有用于接收输入辐射束的光学表面。 光学元件在光学表面下方设置有多个封闭通道，在每个封闭通道上方，光学表面由材料膜形成。 所述变形机构包括一个或多个致动器，所述致动器可操作以使所述膜在所述封闭通道上变形，从而控制所述光学表面的形状并且在所述光学表面上形成充当衍射光栅的周期性结构，使得所述输入辐射 光束从光学元件衍射以形成多个角度分离的子光束。

公开(公告)号：WO2014044496A2

公开(公告)日：2014-03-27

申请号：PCT/EP2013067623

申请日：2013-08-26

Applicant: ASML NETHERLANDS BV

Inventor： AKKERMANS JOHANNES ANTONIUS GERARDUS ,  LEMMEN BAS PIETER ,  HUIBERTS SJOERD MARTIJN ,  LOF JOERI ,  RUTGERS PETRUS THEODORUS ,  HOL SVEN ANTOIN JOHAN ,  SINGH HARMEET ,  HEIJMANS PETER MICHEL SILVESTER MARIA

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70758 ,  H01F7/081 ,  H01F7/1646 ,  H02K41/025 ,  H02P6/16 ,  H02P25/034 ,  H02P25/06 ,  H02P25/08

Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.

Abstract translation: 一种磁阻致动器组件，包括磁阻致动器，用于测量磁阻致动器的间隙中的磁通量的磁通传感器，以及基于磁通量设定点和磁通量测量的磁通量来驱动磁阻致动器的致动器线圈的磁通放大器 通量传感器 一种方法，包括向所述通量放大器提供磁通设定点，所述通量设定点包括时间常数分量和激励频率处的正弦变化分量，以响应于所述通量设定点测量由所述磁阻致动器产生的力，以及校准所述磁阻致动器 从测量力组装。