中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

6 records (took 0.035 seconds)

    SOLIDS VAPORIZER
    1.
    发明申请
    SOLIDS VAPORIZER 审中-公开

    公开(公告)号：WO2022183003A1

    公开(公告)日：2022-09-01

    申请号：PCT/US2022/017925

    申请日：2022-02-25

    Applicant: ENTEGRIS, INC.

    Inventor： CARDOZO, Benjamin ,  THOMAS, Jacob

    IPC: C23C16/448

    Abstract: Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

    MODULAR TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER
    3.
    发明申请
    MODULAR TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER 审中-公开

    公开(公告)号：WO2023059827A1

    公开(公告)日：2023-04-13

    申请号：PCT/US2022/045941

    申请日：2022-10-06

    Applicant: ENTEGRIS, INC.

    Inventor： BATTLE, Scott L. ,  THOMAS, Jacob ,  OLSON, Benjamin H. ,  GREGG, John N.

    IPC: C23C16/448 ,  C23C16/45544

    Abstract: A modular tray for an ampoule of a delivery system of solid precursor materials used in Atomic Layer Deposition (ALD) processes, Chemical Vapor Deposition (CVD) processes or both. The modular tray is configured with separate components which can enhance the ease of which the modular tray can be inserted into the ampoule, and the tray is configured to make improved contact with inner wall surfaces of the ampoule to provide improved heat transfer from the inner wall to the modular tray and ultimately to the solid precursor materials disposed on the modular tray.

    LIFT WHEEL LOCK FOR INSTALLING AND/OR REMOVING VAPORIZER VESSELS
    4.
    发明申请
    LIFT WHEEL LOCK FOR INSTALLING AND/OR REMOVING VAPORIZER VESSELS 审中-公开

    公开(公告)号：WO2022226121A1

    公开(公告)日：2022-10-27

    申请号：PCT/US2022/025641

    申请日：2022-04-20

    Applicant: ENTEGRIS, INC.

    Inventor： THOMAS, Jacob

    IPC: B62B3/06 ,  B62B5/04 ,  B66F9/075 ,  B60B33/02

    Abstract: A delivery system includes a handheld electric lift configured to lift at least one vaporizer vessel, and a cabinet configured to hold the at least one vaporizer vessel. The lift includes an elongated mast, an effector attached to the mast, a handler configured to move the lift, and at least one caster. The effector is controlled by an electric power source to move along the mast. Each of the at least one caster includes a stopper and a wheel. The stopper is elongated and is disposed above the wheel. The stopper is configured to engage with the wheel to prevent the wheel from swiveling when the stopper is pushed down. The stopper is further configured to disengage with the wheel to allow the wheel to swivel when the stopper is released. The cabinet includes at least one channel configured to accommodate the at least one caster.

    TAMPER-RESISTANT CHEMICAL REAGENT PACKAGE
    6.
    发明申请
    TAMPER-RESISTANT CHEMICAL REAGENT PACKAGE 审中-公开
    防篡改的化学试剂包装

    公开(公告)号：WO2017184368A1

    公开(公告)日：2017-10-26

    申请号：PCT/US2017/026816

    申请日：2017-04-10

    Applicant: ENTEGRIS, INC.

    Inventor： CHATTERTON, Thomas B. ,  THOMAS, Jacob

    IPC: B65D45/02 ,  B65D55/02 ,  B65D50/00 ,  C23C16/448

    Abstract: A tamper-resistant containment package is described, including a container; a cover configured to engage with the container so that the container and cover form an enclosed volume; and at least one tamper-resistant mechanical fastener that is cooperative with the cover and container to render the containment package tamper-resistant when the container and cover are engaged in a sealed state isolating the enclosed volume from an ambient environment surrounding the containment package. Such containment package is usefully employed for storage and transport of chemical reagents that pose a health, safety, and/or environmental risk if released to an exterior environment of the containment package.

    Abstract translation: 描述了一种防篡改密封包装，其包括容器; 盖，其被构造成与所述容器接合，使得所述容器和盖形成封闭体积; 以及至少一个防篡改机械紧固件，其与容器和容器协作以在容器和盖以密封状态接合时使容器包防篡改，从而将封闭容积与围绕容器包的周围环境隔离。 如果释放到容器包装的外部环境中，这样的容纳包有效地用于存储和运输构成健康，安全和/或环境风险的化学试剂。

Patent Agency Ranking