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1.发明申请公开(公告)号：WO2022104113A1
公开(公告)日：2022-05-19
申请号：PCT/US2021/059208
申请日：2021-11-12
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： PURVIS, Lafe Joseph, II , LANE, Austin , COLBURN, Matthew E.
IPC: C07C271/16 , C07C271/28 , C07C271/48 , C07C323/12 , C07C323/20 , C07C323/43 , C07C333/04 , C07D317/64 , G03F7/00 , G03H1/02
Abstract: The disclosure provides recording materials including mono- or poly-phenyl-core derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed for mono- or poly-phenyl-core derivatized monomers and polymers for use in Bragg gratings applications, leading to materials with higher refractive index, low birefringence, and high transparency. The disclosed mono- or poly-phenyl-core derivatized monomers and polymers thereof can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
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公开(公告)号：WO2019209422A1
公开(公告)日：2019-10-31
申请号：PCT/US2019/021981
申请日：2019-03-13
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： COLBURN, Matthew E. , CALAFIORE, Giuseppe , LEIBOVICI, Matthieu Charles Raoul , MOHANTY, Nihar Ranjan
IPC: G02B5/18
Abstract: A manufacturing system performs a deposition of an etch-compatible film over a substrate. The etch-compatible film includes a first surface and a second surface opposite to the first surface. The manufacturing system performs a partial removal of the etch-compatible film to create a surface profile on the first surface with a plurality of depths relative to the substrate. The manufacturing system performs a deposition of a second material over the profile created in the etch-compatible film. The manufacturing system performs a planarization of the second material to obtain a plurality of etch heights of the second material in accordance with the plurality of depths in the profile created in the etch-compatible film. The manufacturing system performs a lithographic patterning of a photoresist deposited over the planarized second material to obtain the plurality of etch heights and one or more duty cycles in the second material.
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3.发明申请
公开(公告)号：WO2021108282A1
公开(公告)日：2021-06-03
申请号：PCT/US2020/061714
申请日：2020-11-23
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： PURVIS, Lafe , LANE, Austin , COLBURN, Matthew E.
IPC: C07C271/16 , C07C271/28 , C07C271/34 , C07C323/19 , C07C323/21 , C07C329/06 , C07D303/30 , C07D333/46 , C07D405/14 , G03H1/02
Abstract: The disclosure provides recording materials including aromatic substituted methane-core derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed for monomers and polymers for use in Bragg gratings applications leading to materials with higher refractive index, low birefringence, and high transparency. The disclosed derivatized monomers and polymers thereof can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
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4.发明申请
公开(公告)号：WO2021108204A1
公开(公告)日：2021-06-03
申请号：PCT/US2020/061218
申请日：2020-11-19
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： PURVIS, Lafe , LANE, Austin , COLBURN, Matthew E.
IPC: C07C235/34 , C07C271/48 , C07D409/12 , G03H1/02
Abstract: The disclosure provides recording materials including aromatic substituted ethane-core derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed for monomers and polymers for use in Bragg gratings applications, leading to materials with higher refractive index, low birefringence, and high transparency. The disclosed derivatized monomers and polymers thereof can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
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公开(公告)号：WO2020176528A1
公开(公告)日：2020-09-03
申请号：PCT/US2020/019727
申请日：2020-02-25
Applicant: FACEBOOK TECHNOLOGIES, LLC.
Inventor： VORA, Ankit , MOHANTY, Nihar Ranjan , LANE, Austin , COLBURN, Matthew E. , FRANKE, Elliott
IPC: G02B5/18 , G03F7/004 , H01J37/305
Abstract: Disclosed herein are techniques for fabricating straight or slanted variable-etch-depth gratings. A photoresist material for fabricating a variable-etch-depth grating in a substrate is sensitive to light with a wavelength shorter than 300 nm and has an etch rate comparable to the etch rate of the substrate. A depth of an exposed portion of a photoresist material layer including the photoresist material correlates with the exposure dose. After exposure using a gray-scale mask and development, the photoresist material layer has a non-uniform thickness. The photoresist material layer with the non-uniform thickness and the underlying substrate are etched using a straight etching or slanted etching process to form the straight or slanted variable-etch-depth grating in the substrate. The variable-etch-depth grating is characterized by a non-uniform depth profile corresponding to the non-uniform thickness of the photoresist material layer before etching.
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公开(公告)号：WO2022104137A1
公开(公告)日：2022-05-19
申请号：PCT/US2021/059241
申请日：2021-11-12
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： LANE, Austin , COLBURN, Matthew E. , PURVIS II, Lafe Joseph
IPC: C07C233/65 , C07C271/16 , C07C323/12 , C07C323/20 , C07F9/18 , C08J3/00 , G03H1/02
Abstract: The disclosure provides recording materials including propane derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed for propane derivatized monomers and polymers for use in Bragg gratings applications, leading to materials with higher refractive index, low birefringence, and high transparency. The disclosed propane derivatized monomers and polymers thereof can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
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公开(公告)号：WO2022060485A1
公开(公告)日：2022-03-24
申请号：PCT/US2021/045043
申请日：2021-08-06
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： FRANKE, Elliott , MOHANTY, Nihar Ranjan , LANE, Austin , COLBURN, Matthew E. , VORA, Ankit
Abstract: A method of fabricating gratings with variable grating depths including depositing a first grating material layer with a uniform thickness profile on a substrate, forming an etch mask layer having a variable thickness profile on the first grating material layer, etching the etch mask layer and the first grating material layer to change the uniform thickness profile of the first grating material layer to a non-uniform thickness profile, forming a patterned hard mask on the first grating material layer, and etching, using the patterned hard mask, the first grating material layer to form a grating with a variable depth in the first grating material layer.
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8.发明申请
公开(公告)号：WO2021108597A1
公开(公告)日：2021-06-03
申请号：PCT/US2020/062284
申请日：2020-11-25
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： LANE, Austin , COLBURN, Matthew E. , PURVIS, Lafe
Abstract: The disclosure provides recording materials including thiophosphate derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed for thiophosphate derivatized monomers and polymers for use in Bragg gratings applications, leading to materials with higher refractive index, low birefringence, and high transparency. The disclosed thiophosphate derivatized monomers and polymers thereof can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
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公开(公告)号：WO2021108232A1
公开(公告)日：2021-06-03
申请号：PCT/US2020/061396
申请日：2020-11-19
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： PURVIS, Lafe , LANE, Austin , COLBURN, Matthew E.
IPC: C07C271/48 , C07C323/18 , G03H1/02
Abstract: The disclosure provides recording materials including anthraquinone derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed for anthraquinone derivatized monomers and polymers for use in Bragg gratings applications, leading to materials with higher refractive index, low birefringence, and high transparency. The disclosed anthraquinone derivatized monomers and polymers thereof can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
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10.发明申请
公开(公告)号：WO2021108191A1
公开(公告)日：2021-06-03
申请号：PCT/US2020/061120
申请日：2020-11-18
Applicant: FACEBOOK TECHNOLOGIES, LLC
Inventor： PURVIS, Lafe , LANE, Austin , COLBURN, Matthew E.
IPC: C07C235/34 , C07C271/48 , C07D407/10 , G03H1/02
Abstract: The disclosure provides recording materials including aromatic substituted alkane-core derivatized monomers and polymers for use in volume Bragg gratings, including, but not limited to, volume Bragg gratings for holography applications. Several structures are disclosed, including Formula I. When used in Bragg gratings applications, the monomers and polymers disclosed lead to materials with higher refractive index, low birefringence, and high transparency. The disclosed derivatized monomers and polymers can be used in any volume Bragg gratings materials, including two-stage polymer materials where a matrix is cured in a first step, and then the volume Bragg grating is written by way of a second curing step of a monomer.
