SLAB AMPLIFICATION DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    1.
    发明申请
    SLAB AMPLIFICATION DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开
    SLAB放大装置,激光装置和超极紫外线发光系统

    公开(公告)号:WO2012066402A1

    公开(公告)日:2012-05-24

    申请号:PCT/IB2011/002663

    申请日:2011-11-10

    Abstract: An EUV light generation system (100) includes a driver laser (101) comprising a master oscillator (10) such as a semiconductor laser, a spatial filter (20), gas slab amplification devices (30a, 30b), relay optical systems (R1-R4), and high-speed axial -flow amplifiers (MA1, MA2). The slab amplification devices include beam adjusting optical units (31, 32) disposed, respectively, at input and output sides of the slab amplifiers SA to convert the beam profile and/or polarization direction of the laser beam such that the polarization direction and/or an elongated direction of the beam profile within the slab amplifiers is parallel to a free space axis AF of the slab waveguides, i.e. parallel to the discharge electrodes (331, 332).

    Abstract translation: EUV光发生系统(100)包括:驱动激光器(101),其包括诸如半导体激光器的主振荡器(10),空间滤波器(20),气体平板放大装置(30a,30b),中继光学系统 -R4)和高速轴流放大器(MA1,MA2)。 平板放大装置包括分别设置在平板放大器SA的输入和输出侧的光束调节光学单元(31,32),以转换激光束的光束分布和/或偏振方向,使得偏振方向和/或 平板放大器内的光束轮廓的细长方向平行于平板波导的自由空间轴AF,即平行于放电电极(331,332)。

    LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    2.
    发明申请
    LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开
    激光装置和极光超紫外光发生系统

    公开(公告)号:WO2013144690A1

    公开(公告)日:2013-10-03

    申请号:PCT/IB2013/000029

    申请日:2013-01-09

    Abstract: A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.

    Abstract translation: 激光装置可以包括主振荡器,设置在来自主振荡器的激光束的光束路径中的光学单元,光束调节单元,其设置在激光束的光束路径中的光学单元的上游,并被配置为至少调节 激光束的光束路径和波前的一个;第一检测单元,设置在激光束的光束路径中的光束调整单元和光学单元之间,并且被配置为检测激光束;第二检测单元, 激光束的光束路径中的光学单元,被配置为检测激光束;以及控制器,被配置为基于来自第一和第二检测单元的输出来控制光束调整单元。

    OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    3.
    发明申请
    OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 审中-公开
    光学装置,激光装置和超极紫外线发光系统

    公开(公告)号:WO2012114178A2

    公开(公告)日:2012-08-30

    申请号:PCT/IB2012/000295

    申请日:2012-02-17

    Abstract: An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.

    Abstract translation: 光学装置可以包括:设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元,用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。

    LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
    5.
    发明申请
    LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开
    激光装置,激光系统和极光紫外线发光装置

    公开(公告)号:WO2013144695A1

    公开(公告)日:2013-10-03

    申请号:PCT/IB2013/000356

    申请日:2013-03-08

    Abstract: A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier (7) disposed in an optical path of the pulse laser beam, an energy detector (Mk2) that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section (GCk) configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator. Self-oscillation of the amplifier may be suppressed by controlling (91) the Xe content in the CO2 gas composition or by contolling (8) the excitation energy of the amplifier.

    Abstract translation: 激光装置包括:主振荡器,被配置为输出脉冲激光束;设置在所述脉冲激光束的光路中的至少一个放大器(7);能量检测器(Mk2),其设置在所述光路中的 放大器的输入侧和输出侧,并且被配置为检测来自放大器的自振荡光的能量,被配置为调整放大器的增益的增益调整部(GCk),以及被配置为控制增益的控制单元 当脉冲激光束未从主振荡器输入到放大器中时,基于来自能量检测器的检测结果的调整部分。 可以通过控制(91)CO 2气体组成中的Xe含量或通过调节(8)放大器的激发能量来抑制放大器的自振荡。

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