Abstract:
An EUV light generation system (100) includes a driver laser (101) comprising a master oscillator (10) such as a semiconductor laser, a spatial filter (20), gas slab amplification devices (30a, 30b), relay optical systems (R1-R4), and high-speed axial -flow amplifiers (MA1, MA2). The slab amplification devices include beam adjusting optical units (31, 32) disposed, respectively, at input and output sides of the slab amplifiers SA to convert the beam profile and/or polarization direction of the laser beam such that the polarization direction and/or an elongated direction of the beam profile within the slab amplifiers is parallel to a free space axis AF of the slab waveguides, i.e. parallel to the discharge electrodes (331, 332).
Abstract:
A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.
Abstract:
An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
Abstract:
A regenerative amplifier (20) according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors (21a, 21b) constituting an optical resonator; a C02 slab amplifier (25) provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system (26, 27) disposed to configure a multipass optical path (C2) along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position (la) as an optical image of the laser beam at a second position (lb).
Abstract:
A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier (7) disposed in an optical path of the pulse laser beam, an energy detector (Mk2) that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section (GCk) configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator. Self-oscillation of the amplifier may be suppressed by controlling (91) the Xe content in the CO2 gas composition or by contolling (8) the excitation energy of the amplifier.
Abstract:
Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.