公开(公告)号：WO2016033349A1

公开(公告)日：2016-03-03

申请号：PCT/US2015/047238

申请日：2015-08-27

Applicant: KIONIX, INC. ,  ADAMS, Scott, G. ,  BLACKMER, Charles, W. ,  LYNCH, Kristin, J.

Inventor： ADAMS, Scott, G. ,  BLACKMER, Charles, W. ,  LYNCH, Kristin, J.

IPC: G01L9/00

CPC classification number: G01L9/003 ,  B81B3/0072 ,  B81B2201/0264 ,  B81C1/00 ,  B81C1/00666 ,  B81C2201/0167 ,  G01L9/0027 ,  G01L9/0055 ,  G01L9/0073 ,  G01L9/008 ,  G01L9/0082 ,  G01L13/00 ,  G01L13/02 ,  G01P15/006 ,  G01P15/08 ,  H01L21/00

Abstract: Techniques are described herein that perform pressure sensing using pressure sensor(s) that include deformable pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. A deformable pressure vessel is a pressure vessel that has at least one curved portion that is configured to structurally deform (e.g., bend, shear, elongate, etc.) based on a pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel.

Abstract translation: 本文描述了使用包括可变形压力容器的压力传感器进行压力感测的技术。 压力容器是具有限定空隙的横截面的物体。 可变形的压力容器是具有至少一个弯曲部分的压力容器，该弯曲部分构造成基于空腔中的腔体压力之间的压力差在结构上变形（例如弯曲，剪切，细长等），其中至少一个 压力容器的一部分被悬浮并且在压力容器中存在容器压力。

公开(公告)号：WO2012112395A3

公开(公告)日：2012-08-23

申请号：PCT/US2012/024672

申请日：2012-02-10

Applicant: KIONIX, INC. ,  ADAMS, Scott, G. ,  MINNICK, Andrew, J. ,  BLACKMER, Charles, W. ,  BRENNAN, Kenneth, D. ,  DEVOE, Mollie, K.

Inventor： ADAMS, Scott, G. ,  MINNICK, Andrew, J. ,  BLACKMER, Charles, W. ,  BRENNAN, Kenneth, D. ,  DEVOE, Mollie, K.

IPC: B81B3/00

Abstract: A micro-electromechanical system (MEMS) device includes a substrate, a first beam, a second beam, and a third beam. The first beam includes first and second portions separated by an isolation joint. The first and second portions each comprise a semiconductor and a first dielectric layer. An electrically conductive trace is mechanically coupled to the first beam and electrically coupled to the second portion's semiconductor but not the first portion's semiconductor. The second beam includes a second dielectric layer. The profile of each of the first, second, and third beams has been formed by a dry etch. A cavity separates a surface of the substrate from the first, second, and third beams. The cavity has been formed by a dry etch. A side wall of each of the first, second, and third beams has substantially no dielectric layer disposed thereon, and the dielectric layer has been removed by a vapor-phase etch.

公开(公告)号：WO2014137367A2

公开(公告)日：2014-09-12

申请号：PCT/US2013/042886

申请日：2013-05-28

Applicant: KIONIX, INC.

Inventor： STIRLING, Nathan, L. ,  DEWALT, Luke, E. ,  STRAIT, James, E. ,  ADAMS, Scott, G.

IPC: G01D18/00 ,  G01B21/00

CPC classification number: B81C99/005

Abstract: A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with, multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

Abstract translation: 提供了用于校准被测器件的校准单元，系统和方法。 校准单元，系统和方法使用单轴旋转单元在测试头上校准被测设备。 单轴旋转单元构造成从已知轴线以一定角度延伸。 测试头可以设计成具有多边形的截头锥体的形状。 校准单元，系统和方法可以使用重力激励，亥姆霍兹线圈激励和旋转速率激励的组合来校准被测器件。 校准单元，系统和方法可以自由地校准3度或更高的MEMS器件。

公开(公告)号：WO2012112452A3

公开(公告)日：2012-08-23

申请号：PCT/US2012/024886

申请日：2012-02-13

Applicant: KIONIX, INC. ,  BLACKMER, Charles, W. ,  ADAMS, Scott, G. ,  HOCKING, Andrew, S. ,  LYNCH, Kristin, J. ,  SHAH, Ashish, A.

Inventor： BLACKMER, Charles, W. ,  ADAMS, Scott, G. ,  HOCKING, Andrew, S. ,  LYNCH, Kristin, J. ,  SHAH, Ashish, A.

IPC: B81C1/00 ,  H01L21/762

Abstract: In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid.

公开(公告)号：WO2004059678A1

公开(公告)日：2004-07-15

申请号：PCT/US2002/041482

申请日：2002-12-26

Applicant: KIONIX, INC.

Inventor： ADAMS, Scott, G. ,  MILLER, Scott, A.

IPC: H01H51/22

CPC classification number: H01L21/76208 ,  H01H59/0009

Abstract: A relay (10) for switching an electrical signal includes switching elements(14, 18), an actuator (12) for closing the switch (18), and an actuator for opening the switch (12), the latter two of which are mechanically decoupled when the relay (10) is in a mechanical rest position. When a relay close signal is applied, the closing actuator (18) electrostatically drives the switching elements (14, 18) to complete a signal path between two terminals for the switched signal (22,24). In the process of closing the switch, the opening actuator (12) remains stationary, i.e., no mass is displaced. Application of a switch open signal electrostatically drives the opening actuator, optionally in combination with a mechanical restoring force on the closing actuator (18) to open the switch (18) to break the signal conduction path for the switched signal.

Abstract translation: 用于切换电信号的继电器（10）包括开关元件（14,18），用于闭合开关（18）的致动器（12）和用于打开开关（12）的致动器，后者两个机械地 当继电器（10）处于机械停止位置时，它被解耦。 当施加继电器闭合信号时，关闭致动器（18）静电驱动开关元件（14,18），以完成用于开关信号（22,24）的两个端子之间的信号路径。 在关闭开关的过程中，打开致动器（12）保持静止，即没有质量位移。 开关开启信号的应用静电地驱动开启致动器，可选地与闭合致动器（18）上的机械恢复力组合以打开开关（18），以断开开关信号的信号传导路径。

公开(公告)号：WO2003036305A2

公开(公告)日：2003-05-01

申请号：PCT/US2002/032993

申请日：2002-10-16

Applicant: KIONIX, INC.

Inventor： ADAMS, Scott, G. ,  MILLER, Scott, A. ,  JOHNSON, Wendy, Jo, H.

IPC: G01P

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

Abstract translation: 加速度计 蚀刻硅晶片以形成通常布置在晶片平面中的固定部分和可移动部分之间的弹性联接，可移动部分的质量集中在弹性联轴器的一侧上 。 硅结构的固定和可移动部分之一包括第一电极。 固定和可移动部分中的另一个包括平行于加速轴定向的第二电极，和作为共面的第三电极电连接并与第二电极机械耦合的导电层。 第二电极和第三电极与第一电极电容地相对配置，第一电极和第三电极之间的电容随着可移动部分沿着加速轴相对于固定部分的方向移动而增加，并且随着可移动部分移动 在相反的方向。 弹性联接器保持第一和第三电极跨过电容间隙彼此电容地相对，同时响应于沿垂直于晶片平面的加速轴的加速度，允许第一电极相对于第二和第三电极的运动， 并且当加速停止时，将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时，第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量。