公开(公告)号：WO1988005166A1

公开(公告)日：1988-07-14

申请号：PCT/US1988000044

申请日：1988-01-07

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  HARITONIDIS, Joseph, H. ,  HOWE, Roger, T. ,  SCHMIDT, Martin, A. ,  SENTURIA, Stephen, D.

IPC: G01N13/00

CPC classification number: G01N13/00

Abstract: A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate (14) is suspended by arms (16) to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate (14). The cavity (21) beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optical readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.

Abstract translation: 在存在波动压力的情况下，使用微桥来精确测量时变剪切力。 微尺寸板（14）由臂（16）悬挂以形成微桥。 微尺寸使得能够在板（14）的整个表面均匀地感测到感兴趣的最小湍流尺度。 微桥下面的空腔（21）非常小，使得在空腔内的空气中产生粘性阻力并阻止板的正常运动。 结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感，并因此感测与法向力无关的侧向力。 微桥传感器通过表面微加工制造。 牺牲层沉积在衬底上。 沉积并图案化结构层以在牺牲层上形成板和支撑臂。 通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。 在差分电容读出方案中，微桥板中的导电层与衬底中的导体电容耦合。 感测到的电容耦合变化产生板偏转的指示，从而产生与垂直运动无关的剪切应力。 也可以采用光学读出方案，并且容易地结合在制造工艺中。 安装构件将微桥传感器压入保持板，该保持板适合与目标壁齐平的匹配槽。

公开(公告)号：WO2002071132A2

公开(公告)日：2002-09-12

申请号：PCT/US2002/007150

申请日：2002-03-04

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  HUNG, Elmer, S. ,  DEUTSCH, Erik, R. ,  SENTURIA, Stephen, D.

Inventor： HUNG, Elmer, S. ,  DEUTSCH, Erik, R. ,  SENTURIA, Stephen, D.

IPC: G02F

CPC classification number: G02B6/3516 ,  G02B6/2931 ,  G02B6/29383 ,  G02B6/3524 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594 ,  G02B6/3598 ,  G02B6/4246 ,  G02B26/0808 ,  H04J14/0201 ,  H04J14/0204 ,  H04J14/0205 ,  H04J14/0213

Abstract: A method of redirecting light using an actuatable two-layer diffraction grating structure, the method having applications in wavelength-division multiplexed systems. An optical add/drop modulator (OADM) including an actuatable diffraction grating, for use with a wavelength-division multiplexed signal. An OADM having an optical source located off the main pathway to direct a optical carrier to be added onto the actuatable diffraction grating such that the carrier is diffracted into the main pathway. A detector to measure signal strength for use with an optical processor, the optical processor having an actuatable structure having gaps between the actuated portion of the structure. The detector detecting the portions of light diffracted by the gaps.

Abstract translation: 使用可致动的双层衍射光栅结构重定向光的方法，该方法在波分复用系统中具有应用。 包括可驱动衍射光栅的光学分插调制器（OADM），用于波分复用信号。 OADM具有位于主路径之外的光源，以引导光学载体被添加到可致动的衍射光栅上，使得载体被衍射到主路径中。 用于测量与光学处理器一起使用的信号强度的检测器，所述光学处理器具有可致动结构，所述可致动结构在结构的致动部分之间具有间隙。 检测器检测由间隙衍射的部分光。

公开(公告)号：WO1998002643A1

公开(公告)日：1998-01-22

申请号：PCT/US1997012137

申请日：1997-07-14

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  EPSTEIN, Alan, H. ,  SENTURIA, Stephen, D. ,  WAITZ, Ian, A. ,  LANG, Jeffrey, H. ,  JACOBSON, Stuart, A. ,  EHRICH, Fredric, F. ,  SCHMIDT, Martin, A. ,  ANANTHASURESH, G., K. ,  SPEARING, Mark, S. ,  BREUER, Kenneth, S. ,  NAGLE, Steven, F.

IPC: F01D05/28

CPC classification number: F23R3/42 ,  F01D5/28 ,  F01D15/06 ,  F01D25/20 ,  F01K13/00 ,  F02C3/05 ,  F02K9/48 ,  F05D2220/50 ,  F05D2230/14 ,  F05D2250/82 ,  F05D2250/84 ,  F05D2300/2261 ,  F05D2300/2283 ,  F05D2300/607 ,  F23C2900/03001

Abstract: The invention provides a micro-gas turbine engine and associated microcomponentry. The engine components, including, e.g., a compressor, a diffuser having diffuser vanes, a combustion chamber, turbine guide vanes, and a turbine are each manufactured by, e.g., microfabrication techniques, of a structural material that can be common to all of the elements, e.g., a microelectronic material such as silicon or silicon carbide. Vapor deposition techniques, as well as bulk wafer etching techniques, can be employed to produce the engine. The engine includes a rotor having a shaft with a substantially untapered compressor disk on a first end, defining a centrifugal compressor, and a substantially untapered turbine disk on the opposite end, defining a radial inflow turbine. The rotor is preferably formed of a material characterized by a strength-to-density ratio that enables a rotor speed of at least about 500,000 rotations per minute. An annular, axial-flow combustion chamber is provided that is located axially between the compressor and turbine disks and that has a ratio of annular height to axial length of at least about 0.5. The micro-gas turbine engine can be configured with an integral microgenerator as a source of electrical power, and can be employed for a wide range of power, propulsion, and thermodynamic cycle applications.

Abstract translation: 本发明提供一种微型燃气涡轮发动机和相关的微型部件。 包括例如压缩机，具有扩散器叶片的扩散器，燃烧室，涡轮引导叶片和涡轮机的发动机部件各自通过例如微细加工技术来制造，所述结构材料可以是所有的 元件，例如微电子材料，例如硅或碳化硅。 可以采用气相沉积技术以及体晶片蚀刻技术来制造发动机。 发动机包括具有轴的转子，其具有在第一端上具有基本上未经紧固的压缩机盘，限定离心压缩机的轴和在相对端上的基本上未配套的涡轮盘，限定径向流入涡轮机。 转子优选地由特征在于强度与密度之比的材料形成，其能够使转子速度为每分钟至少大约50万转。 提供了一种环形的轴向流动燃烧室，其轴向位于压缩机和涡轮盘之间，并且具有至少约0.5的环形高度与轴向长度的比率。 微型燃气涡轮发动机可以配置有一个整体的微型发电机作为电力来源，并且可以用于广泛的动力，推进和热循环应用。

公开(公告)号：WO1990012483A1

公开(公告)日：1990-10-18

申请号：PCT/US1990001790

申请日：1990-04-03

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  VOLFSON, David ,  SENTURIA, Stephen, D.

IPC: H05K03/46

CPC classification number: H05K3/4682 ,  H01L23/5383 ,  H01L23/5384 ,  H01L23/5387 ,  H01L2221/68345 ,  H01L2224/1147 ,  H01L2924/01019 ,  H01L2924/3011 ,  H05K3/002 ,  H05K3/0023 ,  H05K3/0041 ,  H05K3/062 ,  H05K3/108 ,  H05K3/205 ,  H05K3/388 ,  H05K3/423 ,  H05K3/467 ,  H05K2201/0154 ,  H05K2201/0355 ,  H05K2201/0394 ,  H05K2201/096 ,  H05K2203/016 ,  H05K2203/0733 ,  H05K2203/095

Abstract: A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) (112) and metal (122, 124, 126) (e.g., copper) is built on a substrate (100) supporting a continuous layer of metal (106). This metal layer (106) is used as an electrode for plating vias (118) through all the dielectric layers (112). Once the desired number of layers are formed, the substrate (112) is removed and the continuous metal layer (106) is patterned. Solid metal vias (118) having nearly vertical side walls can be stacked vertically, producing good electrical and thermal transfer paths and permitting small, closely-spaced conductors. Further, by mixing geometrical shapes of conductors, a variety of useful structures can be achieved, such as controlled impedance transmission lines and multiconductor TAB tape with interconnects on tape of different dimensions from TAB fingers (252).

公开(公告)号：WO1988004126A1

公开(公告)日：1988-06-02

申请号：PCT/US1987003000

申请日：1987-11-17

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  HARITONIDIS, Joseph, H. ,  SENTURIA, Stephen, D. ,  WARKENTIN, David, J. ,  MEHREGANY, Mehran

IPC: H04R23/00

CPC classification number: G01L9/0079 ,  H04R23/008

Abstract: A thin diaphragm (22) receives pressure across one side and faces a beam splitter (25) on the other side. The beam splitter (25) is integrally attached to the diaphragm (22) and serves as a local optical reference plane for the entire assembly. A small cavity (40) is formed between the diaphragm (22) and beam splitter (25). Coherent light from a light source (49) is partially reflected at the beam splitter (25). The remainder of the light is reflected from the diaphragm (22). The reflected beams recombine at a detection point and form an interference pattern. The phase difference between the reflected beams is a function of the amount of deflection of the diaphragm (22). The interference pattern being indicative of the deflection of the diaphragm is received by a light detector (34). Optical calibration of the assembly is a function of the distance between the diaphragm (22) and beam splitter (25) which remains as predefined because the beam splitter (25) is integral with the diaphragm. A vent (28) in the small cavity enables the diaphragm (22) to sense small pressures with increased sensitivity. Fiber optics enable use of the assembly in high temperatures.