公开(公告)号：WO2007106176A2

公开(公告)日：2007-09-20

申请号：PCT/US2006/060195

申请日：2006-10-24

Applicant: MKS INSTRUMENTS, INC. ,  VERNITSKIY, Grigoriy, N. ,  LEVIT, Lawrence ,  GEFTER, Peter

Inventor： VERNITSKIY, Grigoriy, N. ,  LEVIT, Lawrence ,  GEFTER, Peter

IPC: H01J27/00

CPC classification number: H01T23/00

Abstract: At least one orifice is added to an AC ionizer with nozzles and ionizing electrodes that are used to remove static charge. The orifice is placed in a location where electrostatic forces are weak and where gas ions can be easily extracted from the ionizer. Ionizer effectiveness is enhanced by recovering gas ions that are normally trapped between the nozzles and under a portion of the ionizer from which the nozzles project. Without the orifice properly positioned, the trapped gas ions are lost by recombination or grounding. With the orifice positioned in an area of weak electrostatic forces, more gas ions are available for discharging the charged object. The combined air consumption of nozzles plus at least one orifice is the same or less than nozzles alone would consume for a given discharge time.

Abstract translation: 至少一个孔口被添加到具有用于去除静电荷的喷嘴和电离电极的AC电离器。 孔口被放置在静电力弱的地方，并且气体离子可以容易地从电离器中提取出来。 通过回收通常被捕获在喷嘴之间和喷嘴投射的电离器的一部分之下的气体离子来增强离子发生器的有效性。 没有孔适当定位，捕获的气体离子通过重组或接地而损失。 当孔口位于弱静电力的区域中时，更多的气体离子可用于对带电物体进行放电。 喷嘴加上至少一个孔的组合空气消耗量与给定放电时间单独消耗的喷嘴相同或更小。

公开(公告)号：WO2006127646A2

公开(公告)日：2006-11-30

申请号：PCT/US2006/019817

申请日：2006-05-22

Applicant: MKS INSTRUMENTS, INC.

Inventor： GEFTER, Peter ,  GEHLKE, Scott ,  IGNATENKO, Alexandre

IPC: H02H1/04

CPC classification number: H01T23/00

Abstract: Static neutralization of a charged object is provided by generating, in an ionizing cell or module, an ion cloud having a mix of positively and negatively charged ions, and reshaping the ion cloud by redistributing the ions into two regions of opposite polarity by using a second voltage. The second voltage creates an electrical field, which is preferably located in the vicinity of the ion cloud. The redistribution of the ions increases the effective range in which available ions may be displaced or directed towards the charged object. The electrical field redistributes ions that form the ion cloud. Ion redistribution within the ion cloud occurs because ions having a polarity corresponding to the polarity of the second voltage are repelled from the electrical field, and ions having a polarity opposite from that of the electrical field are attracted to electrical field. Redistribution of the ions into two regions of opposite polarity in the ion cloud in turn reshapes the ion cloud so that a portion of the cloud corresponding to the repelled ions is displaced by ions attracted to the electrical field, thus enhancing the range in which the ions may be dispersed or directed. This manner of redistributing ions into two regions is sometimes referred to as "ion polarization" in the disclosure herein.

Abstract translation: 通过在电离电池或模块中产生具有带正电荷和带负电荷的离子的混合物的离子云，并且通过使用第二个方法将离子重新分布到两个相反极性的区域来重新形成离子云来提供带电物体的静态中和 电压。 第二电压产生电场，其优选位于离子云附近。 离子的再分布增加了有效范围，其中可用的离子可以被置换或引向带电对象。 电场重新分布形成离子云的离子。 离子云中的离子重新分布是因为具有对应于第二电压的极性的极性的离子被从电场排斥，并且具有与电场相反的极性的离子被吸引到电场。 将离子重新分布到离子云中的相反极性的两个区域中，然后重新形成离子云，使得对应于排斥离子的一部分云被被吸引到电场的离子置换，从而增强离子的范围 可能分散或导向。 在本文的公开内容中，将离子重新分配到两个区域中的这种方式有时被称为“离子极化”。

公开(公告)号：WO2008115884A1

公开(公告)日：2008-09-25

申请号：PCT/US2008/057262

申请日：2008-03-17

Applicant: MKS INSTRUMENTS, INC. ,  GEFTER, Peter ,  LEVIT, Lawrence ,  PARTRIDGE, Leslie ,  GEHLKE, Scott

Inventor： GEFTER, Peter ,  LEVIT, Lawrence ,  PARTRIDGE, Leslie ,  GEHLKE, Scott

IPC: H05F1/00

CPC classification number: H01T23/00

Abstract: A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and one reference electrode, a power supply electrically coupled to the emitter(s) and reference electrode(s), disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s), a gas flow source disposed to produce a gas flow across a region that includes these generated ions and the emitter(s), and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s).

Abstract translation: 一种低维护AC气流驱动静电中和器，包括至少一个发射极和一个参考电极，电耦合到发射极和参考电极的电源，设置成产生通过电晕产生离子的输出波形 放电并且当该输出波形被施加到发射极时产生电场，气体源设置为产生跨越包括这些产生的离子和发射极的区域的气流，并且其中在 输出波形减小了由电场产生的电力，使气流能够从发射器携带可能位于发射器周围的区域内的污染颗粒，并使得最小化 污染颗粒积聚在发射器上的可能性。

公开(公告)号：WO2007118182A2

公开(公告)日：2007-10-18

申请号：PCT/US2007/066119

申请日：2007-04-06

Applicant: MKS INSTRUMENTS, INC. ,  GEFTER, Peter ,  OLDYNSKI, Edward ,  WARREN, Brian

Inventor： GEFTER, Peter ,  OLDYNSKI, Edward ,  WARREN, Brian

IPC: H01G9/18

CPC classification number: H01T23/00

Abstract: The present invention pertains to various embodiments for managing ion current balance by independently controlling positive ion current and negative ion current generated during static neutralization. In another embodiment, E-Field compensation may be provided. These embodiments disclose both method and apparatus implementations.

Abstract translation: 本发明涉及通过独立地控制在静态中和期间产生的正离子电流和负离子电流来管理离子电流平衡的各种实施例。 在另一个实施例中，可以提供电场补偿。 这些实施例公开了方法和装置实现方式。

公开(公告)号：WO2007056704A2

公开(公告)日：2007-05-18

申请号：PCT/US2006/060547

申请日：2006-11-03

Applicant: MKS INSTRUMENTS, INC. ,  PARTRIDGE, Leslie ,  GEFTER, Peter ,  VERNITSKIY, Grigoriy, N.

Inventor： PARTRIDGE, Leslie ,  GEFTER, Peter ,  VERNITSKIY, Grigoriy, N.

IPC: H05F3/00

CPC classification number: H01T19/00 ,  B03C3/09 ,  B03C3/68 ,  B03C2201/06 ,  H01T19/04 ,  H01T23/00

Abstract: An improved ionizer for providing an enhanced ion balance of negative and positive ions is disclosed. The ionizer may include a first ion emitter and a second ion emitter; at least one reference electrode coupled to ground; and a power supply for providing an AC voltage to the first and second ion emitter. This power supply is DC isolated from ground. In addition, the present invention includes a first rectifier coupled in series between the first ion emitter and the power supply, a second rectifier coupled in series between the second ion emitter and the power supply. The first and second rectifiers cause a DC bipolar voltage to be created from the first and second ion emitters during operation of the ionizer.

Abstract translation: 公开了一种用于提供负离子和正离子的增强的离子平衡的改进的离子发生器。 电离器可以包括第一离子发射器和第二离子发射器; 耦合到地面的至少一个参考电极; 以及用于向第一和第二离子发射器提供AC电压的电源。 该电源与地电隔离。 此外，本发明包括串联耦合在第一离子发射器和电源之间的第一整流器，串联耦合在第二离子发射器和电源之间的第二整流器。 第一和第二整流器在离子发生器操作期间导致从第一和第二离子发射器产生直流双极电压。

公开(公告)号：WO2010123579A1

公开(公告)日：2010-10-28

申请号：PCT/US2010/001215

申请日：2010-04-23

Applicant: MKS INSTRUMENTS, INC. ,  GEFTER, Peter ,  KLOCHKOV, Aleksey ,  MENEAR, John E. ,  NELSEN, Lyle Dwight

Inventor： GEFTER, Peter ,  KLOCHKOV, Aleksey ,  MENEAR, John E. ,  NELSEN, Lyle Dwight

IPC: G01T1/185

CPC classification number: B03C3/017 ,  B03C3/155 ,  B03C3/383 ,  B03C3/41 ,  B03C3/49 ,  B03C2201/06 ,  B03C2201/24

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.

Abstract translation: 通过从电晕产生的离子分离污染物副产物来清洁电晕气体电离包括建立具有压力并沿下游流动的非离子化气流，建立离子的等离子体区域和污染物副产物，其中压力足够低于 非电离气流以防止至少大部分副产物迁移到非电离气流中，以及将电场施加到足以诱导至少大部分离子迁移到等离子体区域中的电场 非电离气流。