公开(公告)号：WO2013175503A2

公开(公告)日：2013-11-28

申请号：PCT/IN2013/000322

申请日：2013-05-20

Applicant: NANOSNIFF TECHNOLOGIES PVT. LTD.

Inventor： PATIL, Sheetal ,  RAO, V. Ramgopal ,  MUKHERJI, Soumyo ,  GULLAIYA, Nehul

IPC: G01N1/10

CPC classification number: G01N1/40 ,  G01N1/405 ,  G01N30/6095

Abstract: The present invention provides a nanostructure based MEMS preconcentrator for detecting chemicals, explosives and gases. The preconcentrator comprises a micro heater, a temperature sensor, and a sorbent layer. The micro heater heats the system to various temperatures. The temperature is read by a micro-resistance based temperature sensor. The sorbent layer is in the form of semi-conducting oxide nanostructures.

Abstract translation: 本发明提供一种用于检测化学品，爆炸物和气体的基于纳米结构的MEMS预浓缩器。 预浓缩器包括微加热器，温度传感器和吸附剂层。 微加热器将系统加热到各种温度。 温度由基于微电阻的温度传感器读取。 吸附剂层是半导体氧化物纳米结构的形式。