-
1.
公开(公告)号:WO2018049322A1
公开(公告)日:2018-03-15
申请号:PCT/US2017/050951
申请日:2017-09-11
Applicant: ORELTECH LTD. , M&B IP ANALYSTS, LLC
Inventor: ZAMOSHCHIK, Natalia , LIANOV, Konstantin , KOZLOV, Leonid , SHEYNIN, Yana
IPC: C23C18/14
Abstract: A method for forming a metal active component in a hybrid material is provided. The method includes applying a metal precursor formulation on a substrate; and exposing the metal precursor formulation applied on the substrate to a low-energy plasma, wherein the low-energy plasma is operated according to a set of exposure parameters.
Abstract translation: 提供了一种用于在混合材料中形成金属活性组分的方法。 该方法包括将金属前体制剂施用于基材上; 和将施加在衬底上的金属前体制剂暴露于低能等离子体,其中低能等离子体根据一组曝光参数进行操作。