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公开(公告)号:WO2021173209A1
公开(公告)日:2021-09-02
申请号:PCT/US2020/065374
申请日:2020-12-16
Applicant: SUNRISE MEMORY CORPORATION
Inventor: NORMAN, Robert , CHERNICOFF, Richard S. , HARARI, Eli
IPC: H01L25/065 , G06F12/0802 , G06F13/28 , G11C5/02 , G11C11/401 , H01L25/00
Abstract: A memory device includes a first semiconductor wafer portion including two or more adjacent quasi-volatile memory circuits formed on a common semiconductor substrate where each quasi-volatile memory circuit being isolated from an adjacent quasi-volatile memory circuit by scribe lines; and a second semiconductor wafer portion including at least one memory controller circuit formed on a semiconductor substrate. The memory controller circuit includes logic circuits and interface circuits. The memory controller circuit is interconnected to the two or more adjacent quasi-volatile memory circuits of the first semiconductor wafer portion through interconnect structures and the memory controller circuit operates the two or more quasi-volatile memory circuits as one or more quasi-volatile memories.
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公开(公告)号:WO2020117978A1
公开(公告)日:2020-06-11
申请号:PCT/US2019/064538
申请日:2019-12-04
Applicant: SUNRISE MEMORY CORPORATION
Inventor: HERNER, Scott Brad , CHIEN, Wu-Yi Henry , ZHOU, Jie , HARARI, Eli
Abstract: Various methods overcome the limitations and achieve superior scaling by (i) replacing a single highly challenging high aspect ratio etch step with two or more etch steps of less challenging aspect ratios and which involve wider and more mechanically stable active strips, (ii) using dielectric pillars for support and to maintain structural stability during a high aspect ratio etch step and subsequent processing steps, or (iii) using multiple masking steps to provide two or more etch steps of less challenging aspect ratios and which involve wider and more mechanically stable active strips.
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公开(公告)号:WO2022020494A1
公开(公告)日:2022-01-27
申请号:PCT/US2021/042607
申请日:2021-07-21
Applicant: SUNRISE MEMORY CORPORATION
Inventor: PURAYATH, Vinod , HARARI, Eli
IPC: H01L21/311 , H01L21/3213 , G11C11/56 , G11C16/04 , G11C16/10 , H01L21/28 , H01L27/11582 , H01L29/66
Abstract: A process for manufacturing a 3-D NOR memory array provides thin-film storage transistors of each NOR memory string in either shafts or portions of a trench between adjacent shafts.
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公开(公告)号:WO2021207050A1
公开(公告)日:2021-10-14
申请号:PCT/US2021/025722
申请日:2021-04-05
Applicant: SUNRISE MEMORY CORPORATION
Inventor: CHIEN, Wu-Yi Henry , HERNER, Scott Brad , HARARI, Eli
IPC: G11C11/40 , G11C11/00 , G11C11/34 , H01L29/792
Abstract: A thin-film memory transistor includes a source region, a drain region, a channel region, a gate electrode, and a charge-trapping layer provided between the channel region and the gate electrode and electrically isolated therefrom, wherein the charge-trapping layer has includes a number of charge-trapping sites that is 70% occupied or evacuated using a single voltage pulse of a predetermined width of 500 nanoseconds or less and a magnitude of 15.0 volts or less. The charge-trapping layer comprises silicon-rich nitride may have a refractive index of 2.05 or greater or comprises nano-crystals of germanium (Ge), zirconium oxide (ZrO2), or zinc oxide (ZnO). The thin-film memory transistor may be implemented, for example, in a 3-dimensional array of NOR memory strings formed above a planar surface of a semiconductor substrate.
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公开(公告)号:WO2021159028A1
公开(公告)日:2021-08-12
申请号:PCT/US2021/016964
申请日:2021-02-05
Applicant: SUNRISE MEMORY CORPORATION
Inventor: KIM, Youn Cheul , CHERNICOFF, Richard S. , QUADER, Khandker Nazrul , NORMAN, Robert D. , YAN, Tianhon , SALAHUDDIN, Sayeef , HARARI, Eli
IPC: H01L25/00 , H01L25/065 , G06F3/0611 , G06F3/0631 , H01L2224/211 , H01L2224/214 , H01L2225/1047 , H01L24/20 , H01L25/18 , H01L2924/1431 , H01L2924/1435
Abstract: A first circuit formed on a first semiconductor substrate is wafer-bonded to a second circuit formed on a second memory circuit, wherein the first circuit includes quasi-volatile or non-volatile memory circuits and wherein the second memory circuit includes fast memory circuits that have lower read latencies than the quasi-volatile or non-volatile memory circuits, as well as logic circuits. The volatile and non-volatile memory circuits may include static random-access memory (SRAM) circuits, dynamic random-access memory (DRAM) circuits, embedded DRAM (eDRAM) circuits, magnetic random-access memory (MRAM) circuits, embedded MRAM (eMRAM), or any suitable combination of these circuits.
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公开(公告)号:WO2020236611A1
公开(公告)日:2020-11-26
申请号:PCT/US2020/033180
申请日:2020-05-15
Applicant: SUNRISE MEMORY CORPORATION
Inventor: HARARI, Eli , CHIEN, Wu-Yi Henry
IPC: G11C11/40 , G11C16/04 , H01L27/11582
Abstract: A process forms thin-film storage transistors (e.g., HNOR devices) with improved channel regions by conformally depositing a thin channel layer in a cavity bordering a source region and a drain region, such that a portion of the channel material abuts by junction contact the source region and another portion of the channel layer abut by junction contact the drain region. The cavity is also bordered by a storage layer. In one form of the process, the channel region is formed before the storage layer is formed. In another form of the storage layer is formed before the channel region is formed.
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公开(公告)号:WO2019133534A1
公开(公告)日:2019-07-04
申请号:PCT/US2018/067338
申请日:2018-12-21
Applicant: SUNRISE MEMORY CORPORATION
Inventor: HARARI, Eli , HERNER, Scott Brad , CHIEN, Wu-Yi
Abstract: A method to ease the fabrication of high aspect ratio three dimensional memory structures for memory cells with feature sizes of 20 nm or less, or with a high number of memory layers. The present invention also provides an improved isolation between adjacent memory cells along the same or opposite sides of an active strip. The improved isolation is provided by introducing a strong dielectric barrier film between adjacent memory cells along the same side of an active strip, and by staggering memory cells of opposite sides of the active strip.
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公开(公告)号:WO2023033987A1
公开(公告)日:2023-03-09
申请号:PCT/US2022/039473
申请日:2022-08-04
Applicant: SUNRISE MEMORY CORPORATION
Inventor: PETTI, Christopher J. , HARARI, Eli
IPC: G11C11/22 , H01L27/11597 , H01L27/11582 , H01L27/11585
Abstract: A memory structure includes storage transistors organized as horizontal NOR memory strings where the storage transistors are thin-film ferroelectric field-effect transistors (FeFETs) having a ferroelectric gate dielectric layer formed adjacent a semiconductor channel. In some embodiments, the semiconductor channel is formed by an oxide semiconductor material and the ferroelectric storage transistors are junctionless transistors with no p/n junction in the channel. In some embodiments, the ferroelectric storage transistors in each NOR memory string share a first conductive layer as a common source line and a second conductive layer as a common bit line, the first and second conductive layers being in electrical contact with the semiconductor channel. The ferroelectric storage transistors in a multiplicity of NOR memory strings are arranged to form semi-autonomous three-dimensional memory arrays (tiles) with each tile individually addressed and controlled by circuitry in the semiconductor substrate underneath each tile in cooperation with a memory controller.
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公开(公告)号:WO2021173572A1
公开(公告)日:2021-09-02
申请号:PCT/US2021/019270
申请日:2021-02-23
Applicant: SUNRISE MEMORY CORPORATION
Inventor: NORMAN, Robert D. , CHERNICOFF, Richard S. , HARARI, Eli
Abstract: A shared memory provides multi-channel access from multiple computing or host devices. A priority circuit prioritizes the multiple memory requests that are submitted as bids from the multiple host channels, such that those memory access requests that do not give rise to a conflict may proceed in parallel. The shared memory may be multi-ported and a routing circuit routes the prioritized memory access request to the appropriate memory ports where the allowed memory access requests may be carried out.
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公开(公告)号:WO2021127218A1
公开(公告)日:2021-06-24
申请号:PCT/US2020/065670
申请日:2020-12-17
Applicant: SUNRISE MEMORY CORPORATION
Inventor: PURAYATH, Vinod , ZHOU, Jie , CHIEN, Wu-Yi Henry , HARARI, Eli
IPC: H01L21/76 , H01L27/115 , H01L21/3065 , H01L27/1052 , H01L29/6675 , H01L29/78642 , H01L29/78663 , H01L29/78672
Abstract: A process includes (a) providing a semiconductor substrate having a planar surface; (b) forming a plurality of thin-film layers above the planar surface of the semiconductor substrate, one on top of another, including among the thin-film layers first and second isolation layer wherein a significantly greater concentration of a first dopant specie is provided in the first isolation layer than in the second isolation laye (c) etching along a direction substantially orthogonal to the planar surface through the thin-films to create a trench having sidewalls that expose the thin-film layers; (d) depositing conformally a semiconductor material on the sidewalls of the trench; (e) annealing the first isolation layer at a predetermined temperature and a predetermined duration such that the first isolation layer act as a source of the first dopant specie which dopes a portion of the semiconductor material adjacent the first isolation layer; and (f) selectively etching the semiconductor material.