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公开(公告)号：WO2022120229A1
公开(公告)日：2022-06-09
申请号：PCT/US2021/061889
申请日：2021-12-03
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITTRELL, Robert J. , CORE, Craig
IPC: H01L41/083 , H04R17/02 , C01F17/212
Abstract: A low noise piezoelectric sensor, such as a piezoelectric acoustic transducer, includes a first conductive layer, a second conductive layer, and a piezoelectric layer between the first conductive layer and the second conductive layer. The piezoelectric layer comprises aluminum scandium nitride (AlScN) having a scandium content of greater than 15%, in which the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride. In this way, the piezoelectric layer (or the sensor including the piezoelectric layer) achieves a dissipation factor of less than about 0.1%.
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公开(公告)号：WO2022226516A1
公开(公告)日：2022-10-27
申请号：PCT/US2022/071834
申请日：2022-04-21
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITTRELL, Robert J.
IPC: H01L41/113 , H01L41/08 , H01L41/27
Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first cantilever beam element.
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公开(公告)号：WO2020264247A1
公开(公告)日：2020-12-30
申请号：PCT/US2020/039746
申请日：2020-06-26
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITTRELL, Robert J.
Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.
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公开(公告)号：WO2017049278A1
公开(公告)日：2017-03-23
申请号：PCT/US2016/052461
申请日：2016-09-19
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITTRELL, Robert J.
CPC classification number: B81B3/0048 , B81B2201/0257 , B81B2203/0118 , B81B2203/0163 , H04R17/02 , H04R17/025 , H04R31/00 , H04R2201/003 , H04R2410/03
Abstract: A transducer and method for processing a MEMS transducer. In one aspect, the MEMS transducer includes a first plate and a second plate. The MEMS transducer can also include a spring substantially between the first plate and the second plate, the spring including first and second spring arms dimensioned to decrease vertical deflection mismatch between the first and second plates, relative to vertical deflection mismatch of the first and second plates independent of the spring.
Abstract translation: 一种用于处理MEMS换能器的换能器和方法。 在一个方面，MEMS换能器包括第一板和第二板。 MEMS换能器还可以包括基本上在第一板和第二板之间的弹簧，弹簧包括第一和第二弹簧臂，其尺寸被设计成相对于第一和第二板的垂直偏转失配而减小第一和第二板之间的垂直偏转失配 独立于春天。
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公开(公告)号：WO2022240888A2
公开(公告)日：2022-11-17
申请号：PCT/US2022/028609
申请日：2022-05-10
Applicant: VESPER TECHNOLOGIES INC.
Inventor： CARFORE, Michael
IPC: H04R3/00 , H04R29/00 , H04R19/04 , G01R31/2825 , G01R31/2839 , G01R31/2851 , G01R31/2856
Abstract: An apparatus for testing a transducer module includes a test signal generator coupled to a common-mode terminal common to a plurality of transducers, and a signal processing circuit configured to receive output signal from each of said transducers and to produce an output signal. If the transducers are well matched to one another, the output signal will have little or no output amplitude. If there is a mismatch between the transducers, however, the output signal will have an amplitude proportional to the mismatch. The amplitude of the output signal may be compared to a predetermined threshold in order to produce a mismatch output signal indicating the existence of, and/or the degree of, mismatch between the transducers.
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Patent Agency Ranking
公开(公告)号：WO2018035486A1
公开(公告)日：2018-02-22
申请号：PCT/US2017/047658
申请日：2017-08-18
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITTRELL, Robert J.
IPC: H04R17/02
Abstract: A piezoelectric, acoustic device comprising: a substrate; a plurality of plates, each plate comprising a first electrode layer, a piezoelectric layer and a second electrode layer, wherein the piezoelectric layer is in between the first electrode layer and the second electrode layer, and wherein, for each plate, a base of the plate is affixed to the substrate and a remaining portion of the plate is unaffixed to the substrate; and a plate coupling structure affixed to a first one of the plates and to a second one of the plates, wherein the plate coupling structure at least partly covers a gap between a first edge of the first one of the plates and a second edge of the second one of the plates, wherein the first edge faces the second edge; wherein the plate coupling structure comprises a mismatch reduction element and a stopping element, wherein the mismatch reduction element is configured to reduce an amount of mismatch in deflection of the first one of the plates and the second one of the plates, and wherein the stopping element is configured to enable the mismatch reduction element to expand only up to a specified amount.
Abstract translation: 一种压电声学装置，包括：基板; 多个板，每个板包括第一电极层，压电层和第二电极层，其中压电层位于第一电极层和第二电极层之间，并且其中对于每个板， 将板固定到基底上，并将板的其余部分不固定到基底上; 以及板联接结构，所述板联接结构固定到所述板中的第一板和所述板中的第二板，其中所述板联接结构至少部分地覆盖所述板中的所述第一板的第一边缘与所述板中的第二边缘 第二个板，其中第一边缘面对第二边缘; 其中，所述板联接结构包括失配减少元件和止动元件，其中，所述失配减少元件构造成减小所述板中的所述第一板和所述板中的所述第二板的偏转量，并且其中，所述止动元件 被配置为使失配减少元件仅扩展到指定量。
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公开(公告)号：WO2017087928A1
公开(公告)日：2017-05-26
申请号：PCT/US2016/063007
申请日：2016-11-21
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITRELL, Robert J.
CPC classification number: H04R1/222 , H04R17/02 , H04R19/04 , H04R31/006 , H04R2499/11
Abstract: A package comprises: a transducer; a substrate comprising an acoustic port, with the transducer attached to a surface of the substrate and over or adjacent to the acoustic port; and a venting mechanism for venting air or sound pressure from a device comprising the package, with the venting mechanism being affixed to the substrate and partially surrounding the acoustic port, and with the venting mechanism being dimensioned to filter out audio frequencies.
Abstract translation: 包装包括：换能器; 包括声学端口的基底，其中所述换能器连接到所述基底的表面并且在所述声学端口上方或附近; 以及用于从包括包装的装置排出空气或声压的通气机构，其中通气机构固定到基底并且部分地围绕声学端口，并且通气机构的尺寸被设计为过滤掉音频。
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公开(公告)号：WO2017049278A9
公开(公告)日：2017-03-23
申请号：PCT/US2016/052461
申请日：2016-09-19
Applicant: VESPER TECHNOLOGIES INC.
Inventor： LITTRELL, Robert J.
Abstract: A transducer and method for processing a MEMS transducer. In one aspect, the MEMS transducer includes a first plate and a second plate. The MEMS transducer can also include a spring substantially between the first plate and the second plate, the spring including first and second spring arms dimensioned to decrease vertical deflection mismatch between the first and second plates, relative to vertical deflection mismatch of the first and second plates independent of the spring.
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公开(公告)号：WO2022240878A1
公开(公告)日：2022-11-17
申请号：PCT/US2022/028596
申请日：2022-05-10
Applicant: VESPER TECHNOLOGIES INC.
Inventor： CARFORE, Michael , SARAF, Tomer
IPC: H04R3/02 , H04R3/04 , H04R3/06 , H04R3/08 , H04R19/04 , H01L41/1132 , H04R2201/003 , H04R3/002 , H04R3/007
Abstract: Illustrative embodiments enable a MEMS transducer to quickly recover from, acoustic overload events by quickly resetting signal processing circuitry downstream from a MEMS transducer. An acoustic overload sensor detects occurrence of an acoustic overload event, and triggers a reset circuit to operate a set of switches to rapidly drain charge from a corresponding set of capacitances within the transducer, or within the signal processing circuitry, thereby resetting the signal processing circuitry more rapidly than would occur if said transducer or circuitry were allowed to recover on its own.
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公开(公告)号：WO2021142140A1
公开(公告)日：2021-07-15
申请号：PCT/US2021/012526
申请日：2021-01-07
Applicant: VESPER TECHNOLOGIES, INC.
Inventor： CORE, Craig , BASAERI, Hamid , LITTRELL, Robert
IPC: H04R1/04 , H04R3/00 , H04R17/02 , H04R19/00 , H04R19/04 , B81B2201/0257 , B81B2203/0127 , B81B2203/019 , B81B2203/0315 , B81B2207/012 , B81B3/0021 , B81C1/00158 , B81C2201/013 , H04R19/005 , H04R2201/003 , H04R31/003 , H04R7/06
Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.
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