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发明公开
CN101048292A 输送系统 无效 - 撤回 转让

输送系统
摘要：
本发明提供了一种基底输送系统示例实施例。该系统有引导通路和至少一个输送车辆。输送车辆适合于保持至少一个基底，并能够由引导通路支承和沿该引导通路运动。引导通路包括用于车辆的至少一个运行车道以及至少一个进入车道，该至少一个进入车道偏离运行车道，以便允许车辆选择性地进入和离开运行车道。
摘要（英）：

An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

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