The invention discloses a method for exchanging phosphoric acid solution in manufacturing of integrated circuit of a semiconductor and a control program thereof. After a plurality of batches of operation product, corresponding liquid level sensors of an inner groove (21) and an outer groove (22) carry out partial quantity exchanges of the phosphoric acid solution at the control program so as to ensure that the phosphoric acid solution in the groove always keeps a certain solvent capacity to silicon ions; at the same time, an etching rate of the phosphoric acid solution in each operation product number and all service life of the solution to a silica film can reach the requirement of technology, effectively improve and the problem of precipitation of silica kernel, and improve the quality and the qualification rate of the product.