A detection device of a multi-layer nanometer film tunneling micro-gyroscope consists of a glass substrate, a fixed electrode cathode, a comb electrode anode, a sensitive mass block, a fixed seat, a fixed comb, a damping hole, a detection beam, a driving beam, a connecting block, a tunneling device, and a nano film, wherein a fixed seat and a comb are mounted on the sensitive mass block, the detection consists of the detection beam, the driving beam and the tunneling device, the tunneling device consists of a substrate, an insulating layer, an electrode and a nano film, the fixed electrode cathode and the comb electrode anode are mounted on the glass substrate, the damping hole comprises 96 square via holes, the tunneling device can form a multi-barrier pressure sensitive structure because of the nano film, and the sensitivity of the silicon piezoresistive pressure sensor can increased by 1-2 order of magnitude. The device has reasonable and compact structure, convenient detection, high detecting precision, high sensitivity and high resolution, which is not effected by temperature. Compared with prior art, the detection precision is increased by 2-3 times, the detection data is detailed, accurate and reliable.