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发明公开
CN101276707A MEMS器件和具有所述MEMS器件的便携式通信终端 失效 - 权利终止

MEMS器件和具有所述MEMS器件的便携式通信终端
摘要：
本发明提供一种MEMS器件和具有所述MEMS器件的便携式通信终端。具体地说，提供一种工作电压低、接触压力大且分离力大的MEMS器件成为可能。一种MEMS器件，包括：衬底；设置在所述衬底上的支撑单元；设置在所述衬底上的固定电极；致动器，其包括第一电极、形成于所述第一电极上的第一压电膜以及形成于所述第一压电膜上的第二电极，利用所述支撑单元将所述致动器的一端固定到所述衬底上，所述致动器在连接所述支撑单元和所述固定电极的方向上延伸，所述第一电极被设置成面对所述固定电极；以及止动器单元，其设置在连接所述支撑单元和所述固定电极的直线上，并且设置在所述衬底上，以面对所述第一电极。
摘要（英）：

It is made possible to provide a MEMS device that has a low operation voltage, a large contact pressure force, and a large separation force. A MEMS device includes: a substrate; a supporting unit that is provided on the substrate; a fixed electrode that is provided on the substrate; an actuator that includes a first electrode, a first piezoelectric film formed on the first electrode, and a second electrode formed on the first piezoelectric film, one end of the actuator being fixed onto the substrate with the supporting unit, the actuator extending in a direction connecting the supporting unit and the fixed electrode, the first electrode being located to face the fixed electrode; and a stopper unit that is located above a straight line connecting the supporting unit and the fixed electrode, and is located on the substrate so as to face the first electrode.

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