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发明公开
CN101316693A 用于将模具与固化压印材料分开的技术 失效 - 放弃专利权

用于将模具与固化压印材料分开的技术
摘要：
本发明提供一种用于将模具(136)与固化压印材料分开的方法，该方法包括：在其中包括模具的模板(214)中产生变形。该变形(P2)足以产生一回复力，该回复力大于固化压印材料和模具之间的粘合力。例如，变形可源自模具和模板设置成与模具相反的一侧之间由泵系统(546)产生的压差。这样，变形可以是在模具中足够量值的波状起伏，以接触其上设置固化压印材料的衬底。
摘要（英）：

The present invention provides a method for separating a mold (136) from solidified imprinting material that includes creating deformation in the template (214) in which the mold is included. The deformation (P2) is sufficient to create a returning force that is greater than the adhesion force between the solidified imprinting material and the mold. For example, the deformation may result from a pressure differential created by a pump system (546) between the mold and a side of the template disposed opposite to the mold. In this manner, the distortion may be undulations in the template of sufficient magnitude to contact a substrate upon which the solidified imprinting material is disposed.

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