The invention provides a static sucker edge smoothness detection method. The prior art has no appropriate detection method to detect the smoothness of the static sucker edge, so that a wafer for exposure arranged on the static sucker edge has undesirable edge devices. The static sucker edge smoothness detection method provides a light mask with a plurality of specific graphics; the light mask is arranged in a scan exposure machine station; then the method provides a smooth detection wafer with the size equivalent to that of the static sucker; the detection wafer is arranged on the static sucker; the detection wafer is then scanned and exposed with the light mask; the feature sizes of the specific graphics at the edge and the central region of the detection wafer are measured; finally, thestatic sucker edge smoothness is judged according to the feature sizes of the specific graphics at the edge and the central region of the detection wafer. The detection method can rapidly and accurately detect whether the static sucker edge is smooth or not so as to avoid bad devices caused by roughness of the static sucker edge.