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发明公开
CN101531674A 一种甲基氯硅烷的制备方法 有权

一种甲基氯硅烷的制备方法
摘要：
本发明公开了一种甲基氯硅烷的制备方法，将有机硅单体(CH3)2SiCl2生产过程中产生的低沸物和西门子法生产多晶硅还原工艺中产生的废液混合，以AlCl3为催化剂，在250～400℃下反应合成通式为(CH3)mSiCl4－m的甲基氯硅烷单体，其中m为1～3的正整数。本发明提供的方法不仅生产流程简便易行，易实现工业化，设备投资成本低，操作安全性能稳定，而且具有原料转化率高，产物中(CH3)2SiCl2、(CH3)3SiCl选择性高，产物与催化剂易于分离。
摘要（英）：

The invention discloses a preparation method of methyl chlorosilane. Low-boiling-point substance produced in the production process of organic silicon monomers (CH3)2SiCl2 and waste liquid produced in reduction process of polycrystalline silicon produced by Siemens Method are mixed by using AlCl3 as catalyst, methyl chlorosilane monomers with the general formula of (CH3)mSiCl4-m are reacted and synthetized at the temperature of 250 to 400 DEG C, wherein m is an integral of 1 to 3. The method provided by the invention not only has simple and easy production process, easy realization of industrialization, low equipment investment cost, stable operation safety performance, but also has high raw material conversion, high selectivity of (CH2)2SiCl2, (CH3)3SiCl in products; and the products and the catalyst are easy to separate.

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