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发明授权
CN101567327B 裸晶测试机台用缓冲分类装置及该机台 失效 - 权利终止

裸晶测试机台用缓冲分类装置及该机台
摘要：
本发明公开了一种裸晶测试机台用缓冲分类装置，供该机台测试的多个裸晶被置放于多个测试承载盘中，且每一测试承载盘中均形成有多个分别用以承载该等裸晶的承载槽，受该机台处理装置驱动的缓冲分类装置包括：用于置放上述测试承载盘的缓冲区；多个用于分类置放该等受测裸晶、且分别形成有多个收纳该等裸晶的容置槽的出料承载盘；将该等位于缓冲区中的测试承载盘内的受测裸晶依照该处理装置驱动讯号分别移入对应出料承载盘中的搬移器。本发明还公开了采用上述缓冲分类装置的裸晶测试机台。
摘要（英）：

The invention discloses a buffer sorting device for a bare wafer testing machine platform. A plurality of bare wafers to be tested by the machine platform are placed in a plurality of test loading plates, and a plurality of loading grooves for loading the bare wafers are formed in each test loading plate. The buffer sorting device driven by a processing device of the machine platform comprises a buffer zone, a plurality of discharging loading plates and a moving device, wherein the buffer zone is used for placing the test loading plates; the discharging loading plates are used for placing thebare wafers to be tested in a sorting mode, and a plurality of containing grooves for containing the bare wafers are formed on the discharging loading plates; and the moving device is used for movingthe bare wafers to be tested in the test loading plates arranged in the buffer zones to the corresponding discharging loading plates according to the driving signals of the processing device. The invention also discloses the bare wafer testing machine platform adopting the buffer sorting device.

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