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发明授权
CN101572222B 保护带粘贴装置 失效 - 权利终止

保护带粘贴装置
摘要：
本发明提供一种保护带粘贴装置，该保护带粘贴装置设有：保持台，其由台主体和带支承框架构成，该台主体具有载置保持晶圆的晶圆载置部；该带支承框架呈环状，被隔着切刀移动槽配置在晶圆载置部外侧；多个直线槽，在该带支承框架的上表面上沿着带粘贴方向并列设置；多个直线带支承部，残留在上述直线槽组之间；环状带支承部，在切刀移动槽的外侧粘贴、支承保护带。
摘要（英）：

The present invention provides a protective tape joining apparatus, which is provided with a holding table, a plurality of linear grooves, a plurality of linear tape supporting parts, and an annular tape supporting part. Wherein the holding table is formed by a table main body having a wafer placement part holding a wafer placed thereon and an annular tape supporting frame provided outside the wafer placement part with a cutter blade traveling groove being interposed therebetween, the linear grooves are arranged on the upper surface of the tape supporting frame in parallel in a tape joining direction, the linear tape support parts are located between the linear grooves, and the annular tape supporting part supporting the protective tape at an outer side of the cutter blade traveling groove.

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