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发明公开
CN101639487A 三轴加速度传感器 失效 - 权利终止 复审申请

三轴加速度传感器
摘要：
本发明涉及一种加速度传感器，尤其是三轴加速度传感器，该加速度传感器包括基底和第一质量元件，该第一质量元件如此地与基底连接，使得第一质量元件能绕一轴线旋转，其中，第一质量元件如此地与第二质量元件连接，使得该第二质量元件能沿着平行于所述轴线的第一方向运动，并且第一质量元件如此地与第三质量元件连接，使得该第三质量元件能沿着垂直于所述轴线的第二方向运动。
摘要（英）：

The present invention relates to an acceleration sensor, especially to a triaxial acceleration sensor, which includes a substrate and a first mass element, which is connected to the substrate in sucha way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.

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