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发明公开
CN101652318A 水分生成用反应炉的并列运转方法 无效 - 驳回

水分生成用反应炉的并列运转方法
摘要：
在通过并列运转多座水分生成用反应炉而对应于高纯度水供给量的增大的要求的情况下，本发明能够借助极其简单的孔部件的利用而进行(H 2 )和(O 2 )的混合气体的分流供给，从而能够使混合气体(原料气体)分流装置简单化和大幅降低设备费。即，本发明的水分生成用反应炉的并列运转方法为，在并列地连接的多个水分生成用反应炉的各混合气体入口侧配设具有既定的口径的小孔的孔部件，通过上述各孔部件向各水分生成用反应炉供给来自混合器的氢和氧的混合气体(G)，并且使在各水分生成用反应炉中生成的水分合流而向高纯度水的使用装置供给。
摘要（英）：

In the event of meeting demands for an increase of the amount of high-purity water fed through parallel run of multiple reaction furnaces for moisture generation, simplification of mixed gas (raw gas)distributor and marked reduction of equipment cost are attained by realizing of the distribution supply of H2 and O2 mixed gas with the use of very simple orifice. Accordingly, there is provided a method of parallel run of reaction furnaces for moisture generation, comprising disposing an orifice with bore of given diameter on the mixed gas entrance side of each of parallelly connected multiple reaction furnaces for moisture generation so that not only is hydrogen/oxygen mixed gas (G) from a mixing unit fed through the orifice to each of the reaction furnaces for moisture generation but alsothe moistures generated by the individual reaction furnaces for moisture generation are joined together and fed to high-purity water using apparatus.

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