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CN101772590A 原料气体的供给系统以及成膜装置 无效 - 撤回

原料气体的供给系统以及成膜装置
摘要：
原料气体供给系统(6)，对成为减压环境的气体使用系统(2)供给原料气体。系统具有：存留液体原料或者固体原料的原料罐(40)、一端与原料罐连接而另一端与气体使用系统连接的原料通路(46)、向原料罐内供给运载气体的运载气体供给机构(54)、在原料通路的中途设置的开闭阀(48，50)、加热原料通路以及开闭阀的加热器(64)、控制加热器的温度控制部(92)。原料通路以及上述开闭阀使用具有良好导热性的金属材料形成。
摘要（英）：

Provided is a raw gas supply system (6) for supplying a raw gas to a gas using system (2) set in a pressure-reduced atmosphere. The system comprises a material tank (40) for reserving a liquid material or a solid material, a material passage (46) connected at its one end to the material tank and at its other end to the gas using system, a carrier gas supply mechanism (54) for supplying a carrier gas to the inside of the material tank, ON/OFF valves (48 and 50) disposed midway of the material passage, a heater (64) for heating the material passage and the ON/OFF valves, and a temperature control unit (92) for controlling the heater. The material passage and the ON/OFF valves are formed of a metal material having an excellent heat conductivity.

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