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发明授权
CN101775581B 热处理腔 失效 - 权利终止

热处理腔
摘要：
本发明公开了一种热处理腔，包括底座、内腔壳及腔盖，内腔壳呈中空结构，内腔壳的下端与底座密封连接，内腔壳的上端与腔盖密封连接，底座、内腔壳及腔盖形成密封的处理腔，其中，还包括呈中空结构的外腔壳，内腔壳收容于外腔壳内，外腔壳的下端与底座密封连接，外腔壳的上端与腔盖密封连接底座、腔盖、内腔壳的外壁及外腔壳的内壁形成密闭的传热腔，传热腔内设置有导流板，导流板自底座至腔盖呈螺旋状的密封连接与内腔壳的外壁与外腔壳的内壁之间，导流板、内腔壳的外壁与外腔壳的内壁形成螺旋通道。本发明热处理腔能够通过流体将处理腔原位的冷却或者是加热，能够迅速降低或者提高热处理腔内温度的热处理腔。
摘要（英）：

The invention discloses a hot processing chamber, which comprises a base, an inner cavity shell and a cavity cover, wherein the inner cavity shell has a hollow structure; the lower end of the inner cavity shell is in sealed connection with the base; the upper end of the inner cavity shell is in sealed connection with the cavity cover; and the base, the inner cavity shell and the cavity cover forma sealed processing chamber. The hot processing chamber also comprises an outer cavity shell with a hollow structure; the inner cavity shell is accommodated in the outer cavity shell; the lower end of the outer cavity shell is in sealed connection with the base; the upper end of the outer cavity shell is in sealed connection with the cavity cover; the base, the cavity cover, the outer wall of theinner cavity shell and the inner wall of the outer cavity shell form a sealed heat transfer chamber; a guide plate is arranged in the heat transfer chamber and is helically in sealed connection between the outer wall of the inner cavity shell and the inner wall of the outer cavity shell from the base to the cavity cover; and the guide plate, the outer wall of the inner cavity shell and the inner wall of the outer cavity shell form a helical channel. The hot processing chamber can cool or heat a processing chamber in situ by using a fluid, and can quickly reduce or increase the temperature in the hot processing chamber.

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