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发明公开
CN101839695A LED式固态红外薄膜厚度测量方法 无效 - 撤回

LED式固态红外薄膜厚度测量方法
摘要：
LED式固态红外薄膜厚度测量方法，属于塑料薄膜厚度光学测量领域，本发明为解决采用传统的红外透射法测量薄膜厚度测量误差大、响应速度低的问题。本发明方法为：吸收光LED在光源调制电路的控制下输出波长3.4μm的光脉冲，参比光LED在光源调制电路的控制下后输出波长3.1μm的光脉冲，所述两路不同波长的光同时打在薄膜的同一位置上，透过薄膜的两路光由PbSe传感器吸收并输出电压信号，信号运算和处理单元在光源调制电路输出的同步控制信号的控制下接收所述电压信号，信号运算和处理单元根据接收的电压信号获取薄膜的厚度信息。本发明方法用于在线测量薄膜的厚度。
摘要（英）：

The invention discloses a method for measuring the thickness of an LED type solid infrared thin film, belonging to the optical measurement field for the thickness of a plastic thin film. The invention solves the problems that the traditional infrared transmission method for measuring the thickness of the thin film has great measurement error and low response speed. In the method, an absorbent light LED in the control of a light source modulation circuit outputs light pulse with the wavelength of 3.4 microns; a reference light LED controlled by a light source modulation circuit outputs the light pulse with wavelength of 3.1 mu m; two paths of the lights with different wavelengths are irradiated on the same position of the thin film at the same time; a PbSe sensor absorbs two paths of the lights transmitting the thin film and outputs a voltage signal; in the control of the synchronous control signals output by the light source modulation circuit, a signal computation and processing unit receives the voltage signal and acquires the thickness information according to the received voltage signal. The method of the invention is applied to the online measurement of the thickness of the thin film.

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