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发明公开
CN101840232A 质量流量控制器的测试系统、测试方法、测试用程序 无效 - 撤回

质量流量控制器的测试系统、测试方法、测试用程序
摘要：
本发明提供一种测试系统，其无须对配管等作任何的设计变更便可低价引入到半导体制造工序等所使用的现存的气体配管系统中，且可以短时间进行基于准确的基准容积的质量流量控制器的测试。测试系统中设置有：测试用气体管线(KL)，和支流气体管线(SL)并排设置，且合流于合流后气体管线(ML)；基准容积计算部(32)，计算出由气体配管系统(GS)的配管自身所规定的基准容积；测试用参数计算部(33)，根据在由所要测试的质量流量控制器(1)进行流量控制的期间由压力测定机构(213)测定的测定压力的时间序列数据来计算出测试用参数；以及比较部(33)，将根据基准容积所设定的基准参数和测试用参数进行比较。
摘要（英）：

In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

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