The invention discloses a micromovement detection method based on vision during assembly of precise electrons. The method firstly realizes the pixel-level course location based on relevant phase algorithms and then realizes fine location by means of resampling the area adjacent to the course location point with magnification. The method can realize high-precision movement detection on the X-Y plane and is particularly suitable for high-precision location occasions during the assembly of precise electrons. The invention realizes the pixel-level movement detection through relevant phase principles in a frequency domain by means of collecting two images of a scene image before and after the translation and then realizes the high-precision micromovement detection in sub-pixel level through a high-efficiency neighbourhood resampling technology.