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发明公开
CN102064790A 振动片的制造方法和振子的制造方法 无效 - 撤回 转让

振动片的制造方法和振子的制造方法
摘要：
本发明涉及一种振动片的制造方法和振子的制造方法。在该振动片和振子的制造方法中准备支撑体(10)，该支撑体(10)具有彼此背向相对来确定厚度的第一及第二表面(12、14)，并包括基部(16)和从基部(16)并排延伸且与厚度方向正交的多个臂部(18)。支撑体(10)构成为：在多个臂部(18)各自的第一表面(12)上形成有下部电极膜(20)，在下部电极膜(20)上形成有压电膜(22)，在压电膜(22)上形成有上部电极膜(26)，多个臂部(18)各自的至少一部分在第二表面(14)具有露出区域(30)。对第二表面(14)的露出区域(30)进行蚀刻。通过蚀刻降低厚度，使多个臂部(18)容易沿厚度方向弯曲。
摘要（英）：

The invention relates to a vibrating piece manufacturing method and a vibrator manufacturing method. The manufacturing method prepares a support 10 which has first and second surfaces 12 and 14 which face opposite to each other and define thickness, a base 16, and a plurality of arm parts 18 which are orthogonal in the thickness direction from the base 16 and extend side by side. The support 10 has a lower part electrode film 20 formed on the respective first surfaces 12 of the plurality of arm parts 18, a piezoelectric film 22 formed on the lower part electrode film 20, has an upper part electrode film 26 formed on the piezoelectric film 22, and at least part of the respective plurality of arm parts 18 has exposure areas 30 on the second surfaces 14. The exposure areas 30 on the second surfaces 14 are etched. By reducing the thickness by etching, the plurality of arm parts 18 easily bend in the thickness direction.

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