Provided is an apparatus for manufacturing a thin film solar cell wherein uniformity of film characteristics is improved. In a step of transferring a substrate (S) from one roll (R1) to other roll (R2), a power generating layer (12), i.e., a laminated body of a plurality of semiconductor layers, is formed in a plurality of film forming chambers (23A) partitioned along the transfer direction (D) of the substrate (S) between the pair of rolls (R1, R2). In each film forming chamber (23A), a plurality of planar application electrodes (32) are arranged to face the substrate (S) along the transfer direction, and high frequency power in the VHF region is supplied to a power feeding end section (36) of each of the planar application electrodes (32). When the wavelength of the high frequency poweris expressed by Lambada, the distance between an end section of the planar application electrode (32) and the power feeding end section (36) is set shorter than Lambada/4 in the perpendicular direction to the transfer direction.