利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN102156388A 具有改进的用于等离子体清洁处理的适应性的物体 有权

具有改进的用于等离子体清洁处理的适应性的物体
摘要：
本发明公开了一种具有改进的用于等离子体清洁处理的适应性的物体。所述物体包括：第一外表面区域；第二外表面区域，其中所述物体构造并布置成与可去除盖协同操作使得所述盖可连接至所述物体以覆盖所述第二外表面区域，且其中与所述可去除盖连接的所述物体适于在等离子体清洁装置内被清洁，使得所述等离子体清洁装置不暴露给存在于第二外表面区域的颗粒，和其中所述第一外表面区域在等离子体清洁装置内被清洁。
摘要（英）：

An object suitable for a plasma cleaning treatment in a plasma cleaning device, the object including a first outer surface area; a second outer surface area, wherein the object is constructed and arranged to cooperate with a removable cover such that the cover is connectable to the object to cover the second outer surface area, and wherein the object connected with the removable cover is adapted to be cleaned in the plasma cleaning device such that the plasma cleaning device is not exposed to particles of the second outer surface area and wherein the first outer surface area is cleaned in theplasma cleaning device.

公开/授权文献
0/0