The invention discloses a probe head of a vertical probe card and a method for manufacturing a compound plate of the probe head. The probe head comprises a guide plate, the compound plate and at least one probe, wherein the compound plate is stacked by a first layer plate and a second layer plate through fixing, and a plurality of punched holes passing through the first layer plate and the second layer plate are formed in the compound plate through drilling; the compound plate is arranged below the guide plate; the friction coefficient of the selected first layer plate is less than that of the second layer plate; the thermal expansion coefficient of the second layer plate is less than that of the first layer plate; and the probe passes through the punched holes in the compound plate. Due to the probe head, friction between the probe and the compound plate can be reduced; and an aim of stabilizing the position of the probe can be fulfilled.